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首页> 美国卫生研究院文献>Nanoscale Research Letters >Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler
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Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler

机译：使用高速纳米轮廓仪测量凹面球面镜和平面镜的轮廓

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摘要

Ultraprecise aspheric mirrors that offer nanofocusing and high coherence are indispensable for developing third-generation synchrotron radiation and X-ray free-electron laser sources. In industry, the extreme ultraviolet (wavelength: 13.5 nm) lithography used for high-accuracy aspheric mirrors is a promising technology for fabricating semiconductor devices. In addition, ultraprecise mirrors with a radius of curvature of less than 10 mm are needed in many digital video instruments. We developed a new type of nanoprofiler that traces the normal vector of a mirror's surface. The principle of our measuring method is that the normal vector at each point on the surface is determined by making the incident light beam on the mirror surface and the reflected beam at that point coincide, using two sets of two pairs of goniometers and one linear stage. From the acquired normal vectors and their coordinates, the three-dimensional shape is calculated by a reconstruction algorithm. The characteristics of the measuring method are as follows: the profiler uses the straightness of laser light without using a reference surface. Surfaces of any shape can be measured, and there is no limit on the aperture size. We calibrated this nanoprofiler by considering the system error resulting from the assembly error and encoder scale error, and evaluated the performance at the nanometer scale. We suppressed the effect of random errors by maintaining the temperature in a constant-temperature room within ±0.01°C. We measured a concave spherical mirror with a radius of curvature of 400 mm and a flat mirror and compared the results with those obtained using a Fizeau interferometer. The profiles of the mirrors were consistent within the range of system errors.
机译：提供纳米聚焦和高相干性的超精密非球面镜对于开发第三代同步加速器辐射和X射线自由电子激光源必不可少。在工业上，用于高精度非球面镜的极紫外（波长：13.5 nm）光刻技术是制造半导体器件的有前途的技术。另外，在许多数字视频仪器中需要曲率半径小于10mm的超精密反射镜。我们开发了一种新型的nanoprofiler，它可以跟踪镜子表面的法线向量。我们的测量方法的原理是，通过使用两组两对测角计和一个线性平台使镜面上的入射光束与该点上的反射光束重合来确定表面上每个点的法向矢量。从获取的法向矢量及其坐标，通过重构算法计算三维形状。测量方法的特征如下：轮廓仪使用激光的直线度而不使用参考表面。可以测量任何形状的表面，并且孔径大小没有限制。我们通过考虑由装配误差和编码器比例误差引起的系统误差来校准该纳米轮廓仪，并评估了纳米尺寸的性能。通过将恒温室内的温度保持在±0.01°C以内，我们抑制了随机误差的影响。我们测量了曲率半径为400 mm的凹球面镜和平面镜，并将结果与​​使用Fizeau干涉仪获得的结果进行了比较。镜像的配置文件在系统错误范围内是一致的。

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