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Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

机译：富硅氧化硅中嵌入的硅纳米晶体的基体结构顺序与压缩应力之间的相关性

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AbstractSilicon nanocrystals embedded in a silicon oxide matrix were deposited by radio frequency reactive magnetron sputtering. By means of Raman spectroscopy, we have found that a compressive stress is exerted on the silicon nanocrystal cores. The stress varies as a function of silicon concentration in the silicon-rich silicon oxide layers varies, which can be attributed to changes of nanocrystal environment. By conducting the Fourier transform infrared absorption experiments, we have correlated the stresses exerted on the nanocrystal core to the degree of matrix structural order.

机译：摘要通过射频反应磁控溅射沉积了嵌入氧化硅基质中的硅纳米晶。通过拉曼光谱，我们发现在硅纳米晶核上施加了压应力。应力随着富硅氧化硅层中硅浓度的变化而变化，这可以归因于纳米晶体环境的变化。通过进行傅立叶变换红外吸收实验，我们已经将施加在纳米晶体核上的应力与基质结构有序程度相关联。

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期刊名称 Nanoscale Research Letters
作者
Grzegorz Zatryb; Artur Podhorodecki; Jan Misiewicz; Julien Cardin; Fabrice Gourbilleau;
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作者单位

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年(卷),期 2013(8),1
年度 2013
页码 40
总页数 7
原文格式 PDF
正文语种
中图分类生化遗传学;生化药理学;
关键词
Silicon Nanocrystals Stress Raman Phonon Confinement Order Disorder Matrix;

机译：硅;纳米晶体;应力;拉曼;声子;禁闭;有序;无序;矩阵;

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专利

1. Size-Dependent Indirect Excitation of Trivalent Er Ions via Si Nanocrystals Embedded in a Silicon-Rich Silicon Oxide Matrix Deposited by ECR-PECVD [J] . G.Zatryb, A.Podhorodecki, J.Misiewicz, Journal of nanotechnology . 2009,第1期

机译：三价Er离子通过嵌入ECR-PECVD沉积的富含硅的氧化硅基质中的Si纳米晶体的尺寸依赖性间接激发
2. Structural, optical, and electrical properties of silicon nanocrystals fabricated by high silicon content silicon-rich oxide and silicon dioxide bilayers [J] . Nomoto Keita, Yang Terry Chien-Jen, Ceguerra Anna V., Applied physics express . 2016,第11期

机译：由高硅含量的富硅氧化物和二氧化硅双层制备的硅纳米晶体的结构，光学和电学性质
3. Excess silicon concentration dependence of the structural and optical properties of silicon nanocrystals embedded in silicon oxide matrix [J] . Yussof Bin Wahab, Yeong Wai Woon, Karim Bin Deraman International Journal of Nanomanufacturing . 2010,第1a2期

机译：过量硅浓度对嵌入氧化硅基质中的硅纳米晶体的结构和光学性质的依赖性
4. STRUCTURAL AND OPTICAL PROPERTIES OF SILICON NANOCRYSTALS EMBEDDED IN SILICON OXIDE FILMS [C] . M. MIU, A. ANGELESCU, I. KLEPS, NATO advanced research workshop on towards the First silicon laser . 2003

机译：嵌入氧化硅膜中的硅纳米晶体的结构和光学性质
5. Modeling nucleation, growth and stress: Germanium nanocrystals embedded in silicon dioxide [D] . Yi, Diana Ofelia 2005

机译：模拟成核，生长和应力：嵌入在二氧化硅中的锗纳米晶体
6. Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride [O] . Daniel Hiller, Julian López-Vidrier, Keita Nomoto, 2018

机译：由磷和硼掺杂的富硅氧化物和氮氧化物生长的硅纳米晶体中没有自由载流子
7. Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide [O] . Grzegorz Zatryb, Artur Podhorodecki, Jan Misiewicz, 2013

机译：富硅氧化硅中嵌入的硅纳米晶体的基体结构顺序与压缩应力之间的相关性

Correlation between matrix structural order and compressive stress exerted on silicon nanocrystals embedded in silicon-rich silicon oxide

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