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Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography

机译：光学相干断层扫描技术对激光加工性能的三维无损光学评估

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摘要

We demonstrate the use of optical coherence tomography (OCT) as a non-destructive diagnostic tool for evaluating laser-processing performance by imaging the features of a pit and a rim. A pit formed on a material at different laser-processing conditions is imaged using both a conventional scanning electron microscope (SEM) and OCT. Then using corresponding images, the geometrical characteristics of the pit are analyzed and compared. From the results, we could verify the feasibility and the potential of the application of OCT to the monitoring of the laser-processing performance.

机译：我们演示了使用光学相干断层扫描（OCT）作为非破坏性诊断工具，通过对凹坑和边缘的特征进行成像来评估激光加工性能。使用常规扫描电子显微镜（SEM）和OCT对在不同激光处理条件下在材料上形成的凹坑成像。然后使用相应的图像，分析并比较凹坑的几何特征。从结果中，我们可以验证将OCT应用于监测激光加工性能的可行性和潜力。

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期刊名称 other
作者
Youngseop Kim; Eun Seo Choi; Wooseop Kwak; Yongjin Shin; Woonggyu Jung; Yeh-Chan Ahn; Zhongping Chen;
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作者单位

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年(卷),期 -1(40),4
年度 -1
页码 625–631
总页数 15
原文格式 PDF
正文语种
中图分类
关键词
Optical coherence tomography (OCT) Non-destructive diagnosis Laser marking;

机译：光学相干断层扫描（OCT）;无损诊断;激光打标;

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专利

1. Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography [J] . Kim Y, Choi ES, Kwak W, Optics & Laser Technology . 2008,第4期

机译：光学相干层析成像技术对激光加工性能的三维无损光学评估
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Three-dimensional non-destructive optical evaluation of laser-processing performance using optical coherence tomography

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