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The Methods and Experiments of Shape Measurement for Off-Axis Conic Aspheric Surface

机译：离轴圆锥非球面形状的形状测量方法与实验

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The off-axis conic aspheric surface is widely used as a component in modern optical systems. It is critical for this kind of surface to obtain the real accuracy of the shape during optical processing. As is widely known, the null test is an effective method to measure the shape accuracy with high precision. Therefore, three shape measurement methods of null test including auto-collimation, single computer-generated hologram (CGH), and hybrid compensation are presented in detail in this research. Although the various methods have their own advantages and disadvantages, all methods need a special auxiliary component to accomplish the measurement. In the paper, an off-axis paraboloid (OAP) was chosen to be measured using the three methods along with auxiliary components of their own and it was shown that the experimental results involved in peak-to-valley (PV), root-mean-square (RMS), and shape distribution from three methods were consistent. As a result, the correctness and effectiveness of these three measurement methods were confirmed, which are very useful in engineering.
机译：离轴圆锥非球面被广泛用作现代光学系统的组件。对于这种表面，在光学处理过程中获得形状的真实精度至关重要。众所周知，空试验是一种以高精度测量形状精度的有效方法。因此，本研究详细介绍了空准测试的三种形状测量方法，包括自动准直，单计算机生成的全息图（CGH）和混合补偿。尽管各种方法各有优缺点，但是所有方法都需要特殊的辅助组件来完成测量。在本文中，选择了偏轴抛物面（OAP）来使用这三种方法及其自身的辅助成分进行测量，结果表明，实验结果涉及峰谷（PV），均方根-平方（RMS）和三种方法的形状分布是一致的。结果，证实了这三种测量方法的正确性和有效性，这在工程中非常有用。

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