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Tunable Crystalline Phases in UV-Curable PEG-Grafted Ladder-Structured Silsesquioxane/Polyimide Composites

机译:UV固化PEG接枝的梯形结构倍半硅氧烷/聚酰亚胺复合材料中的可调谐晶相

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摘要

A series of UV-curable hybrid composite blends containing a carboxylic acid functionalized polyimidewith varying amounts of high molecular weight (~1 K) PEG-grafted ladder-structured polysilsesquioxanes copolymerized with methacryl groups were fabricated and their structural, thermal, mechanical, and surface properties characterized. At a composite weight ratio of polyimide above 50 wt.%, a stark shift from amorphous to crystalline polyethylene glycol (PEG) phases were observed, accompanied by a drastic increase in both surface moduli and brittleness index. Moreover, fabricated composites were shown to have a wide range water contact angle, 9.8°–73.8°, attesting to the tunable surface properties of these amphiphilic hybrid polymer composites. The enhanced mechanical properties, combined with the utility of tunable surface hydrophilicity allows for the possible use of these hybrid polymer composites to be utilized as photosensitive polyimide negative photoresists for a myriad of semiconductor patterning processes.
机译:制备了一系列的可紫外固化的杂化复合材料共混物,这些杂化物包含羧酸官能化的聚酰亚胺,并具有与甲基丙烯酸基团共聚的不同数量的高分子量(〜1 K)PEG接枝的梯形结构聚倍半硅氧烷,其结构,热,机械和表面性能表征。在聚酰亚胺的复合重量比高于50wt。%时,观察到从无定形相到结晶聚乙二醇(PEG)相的急剧转变,伴随着表面模量和脆性指数的急剧增加。此外,制成的复合材料的水接触角范围很广,为9.8°–73.8°,证明了这些两亲性杂化聚合物复合材料的可调表面性能。增强的机械性能,加上可调节的表面亲水性的实用性,使得这些杂化聚合物复合材料有可能用作许多半导体图案化工艺的光敏聚酰亚胺负性光致抗蚀剂。

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