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Research on Deterministic Figuring of Ultra-Precision Shaft Parts Based on Analysis and Control of Figuring Ability

机译：基于成形能力分析与控制的超精密轴零件确定性成形研究

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摘要

The application of ultra-precision shaft parts is widely used, such as the spindle core of the air bearing spindle in ultra-precision machine tools. The precision of the spindle core is extremely high, and it is very difficult to obtain directly by traditional Computer Numerical Control (CNC) machine tools but is mostly obtained by manual grinding, whose machining efficiency is greatly limited. Based on the deterministic figuring theory, this paper focuses on the ultra-precision roundness, optimizing the filtering parameters of the measurement error data and studying the generation mechanism of the removal function morphology; the shape of the removal function is adjusted by combining the analysis of the figuring ability and positioning error. Finally, the optimized removal function is used on an experimental steel shaft, the average roundness convergence ratio is 72% higher than that of the original removal function, and the roundness reaches a 0.1 μm level. The result shows that a reasonable filtering of measured data and the removal function adjusted for the surface feature can improve the efficiency and precision of deterministic figuring on shaft parts.
机译：超精密轴零件的应用广泛，例如超精密机床中空气轴承主轴的主轴芯。主轴芯的精度极高，很难通过传统的计算机数控（CNC）机床直接获得，但主要通过手动磨削获得，其加工效率受到极大限制。基于确定性图论，重点研究了超精密度圆度，优化了测量误差数据的滤波参数，研究了去除函数形态的产生机理。通过结合图形能力和定位误差的分析来调整去除功能的形状。最后，在实验钢轴上使用了优化的去除函数，平均圆度收敛率比原始去除函数高72％，圆度达到0.1μm。结果表明，对测量数据进行合理的过滤以及针对表面特征进行调整的去除功能可以提高轴零件确定性图形的效率和精度。

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