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首页> 美国卫生研究院文献>Nanomaterials >Fast Fabrication of Fishnet Optical Metamaterial Based on Femtosecond Laser Induced Stress Break Technique
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Fast Fabrication of Fishnet Optical Metamaterial Based on Femtosecond Laser Induced Stress Break Technique

机译：基于飞秒激光诱导应力断裂技术的鱼网光学超材料快速制造

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摘要

To speed up the fabrication of optical metamaterials by making use of the fast speed advantage of femtosecond laser preparation, a metamaterial appropriate for femtosecond laser processing was designed, and the interaction between femtosecond laser and metal-dielectric-metal fishnet stacks was investigated in detail. Two kinds of processing mechanisms, thermal melting and stress break, were revealed during the fabrication. The thermal melting process, dominated by the interaction of femtosecond laser with metals, makes the upper and lower metal layers adhere to each other, which leads to the magnetic resonance impossible. The stress break process, dominated by the interaction of femtosecond laser with dielectrics, can keep the upper and lower metal coatings isolated. Fishnet optical metamaterial was fabricated by femtosecond laser-induced stress break technique, using back side ablation, high numerical aperture and super-Gaussian beam. The resolution and speed can reach 500 nm, and 100 units/s, respectively. Spectrophotometer measurement results proved that the magnetic resonances were found in the fishnet nanostructure. The theoretical refractive index of the metamaterial on a glass substrate reached −0.12 at the wavelength of 3225 nm. It proved that femtosecond laser-induced stress break was a good and fast tool during the fabrication of optical metamaterials.
机译：为了通过利用飞秒激光制剂的快速速度优势加速光学超材料的制造，设计了适用于飞秒激光加工的超材料，并详细研究了飞秒激光和金属介质 - 金属鱼网堆的相互作用。在制造过程中揭示了两种加工机构，热熔和应力断裂。通过使用金属的飞秒激光器的相互作用的热熔过程使上下金属层彼此粘附，这导致磁共振不可能。由介电器的飞秒激光器相互作用的压力破裂过程可以保持上下金属涂层。 Fishnet光学超材料由飞秒激光诱导的应力断裂技术制造，使用后侧消融，高数值孔径和超高斯光束。分辨率和速度分别可以达到500nm和100个单位/ s。分光光度计测量结果证明，在鱼网纳米结构中发现了磁共振。金属材料在玻璃基板上的理论折射率达到-0.12在3225nm的波长下。事实证明，在光学超材料的制造过程中，飞秒激光诱导的压力断裂是一种良好而快速的工具。

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