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Electrostatically Tuned Optical Filters Based on Hybrid Plasmonic-Dielectric Thin Films for Hyperspectral Imaging

机译：基于混合等离子体介电薄膜的静电调谐光学滤膜进行高光谱成像

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摘要

Hyperspectral imaging has a wide range of uses, from medical diagnostics to crop monitoring; however, conventional hyperspectral imaging systems are relatively slow, bulky, and rather costly. In this paper, we present an inexpensive, compact tunable optical filter for hyperspectral applications. The filter is based on a Fabry-Pérot interferometer utilizing hybrid metallic-dielectric mirrors and actuated using a MEMS electrostatic actuator. The optical filter is designed using the transfer matrix method; then, the results were verified by an electromagnetic wave simulator. The actuator is based on a ring-shaped parallel plate capacitor and is designed using COMSOL Multiphysics. An actuation displacement of 170 nm was used, which is the required distance to tune the filter over the whole visible range (400–700 nm). There are two designs proposed for the optical filter: the first was optimized to provide maximum transmission and the other is optimized to have minimum full-width-half-maximum (FWHM) value. The first design has a maximum transmission percentage of 94.45% and a minimum transmission of 86.34%; while the minimum FWHM design had an average FWHM value of 7.267 nm. The results showed improvements over the current commercial filters both in transmission and in bandwidth.
机译：高光谱成像具有广泛的用途，从医疗诊断到作物监测;然而，传统的高光谱成像系统相对较慢，庞大，并且相当昂贵。在本文中，我们为高光谱应用提出了一种廉价，紧凑的可调光学滤波器。过滤器基于法布里 - Péroot干涉仪利用混合金属介质镜并使用MEMS静电致动器致动。光学滤波器使用传递矩阵法设计;然后，通过电磁波模拟器验证结果。致动器基于环形平行板电容器，并使用COMSOL Multiphysics设计。使用170nm的致动位移，这是在整个可见范围内调整过滤器的所需距离（400-700nm）。有两个设计为滤光器提出：首先优化以提供最大传输，另一个优化为具有最小全宽半最大（FWHM）值。第一个设计具有94.45％的最大透射率，最小透射量为86.34％;虽然最小FWHM设计平均为0.267nm的平均fwhm值。结果表明，在传输和带宽中的当前商业过滤器上显示出改善。

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