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Nano-printed miniature compound refractive lens for desktop hard x-ray microscopy

机译:用于台式硬X射线显微镜的纳米打印微型复合折射透镜

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摘要

Hard x-ray lenses are useful elements in x-ray microscopy and in creating focused illumination for analytical applications such as x-ray fluorescence imaging. Recently, polymer compound refractive lenses for focused illumination in the soft x-ray regime (< 10 keV) have been created with nano-printing. However, there are no such lenses yet for hard x-rays, particularly of short focal lengths for benchtop microscopy. We report the first instance of a nano-printed lens for hard x-ray microscopy, and evaluate its imaging performance. The lens consists of a spherically focusing compound refractive lens designed for 22 keV photon energy, with a tightly packed structure to provide a short total length of 1.8 mm and a focal length of 21.5 mm. The resulting lens technology was found to enable benchtop microscopy at 74x magnification and 1.1 μm de-magnified image pixel size at the object plane. It was used to image and evaluate the focal spots of tungsten-anode micro-focus x-ray sources. The overall system resolution with broadband illumination from a tungsten-anode x-ray tube at 30 kV and 10 mm focal distance was measured to be 2.30±0.22 μm.
机译:硬X射线透镜是X射线显微镜检查和为分析应用(例如X射线荧光成像)创建聚焦照明时的有用元素。近来,已经通过纳米印刷产生了用于软X射线(<10keV)聚焦照明的聚合物复合折射透镜。但是,还没有这种用于硬X射线的透镜,特别是用于台式显微镜的短焦距透镜。我们报告了用于硬X射线显微镜的纳米印刷透镜的首次实例,并评估了其成像性能。该透镜由专为22 keV光子能量设计的球面聚焦复合折射透镜组成,具有紧密包装的结构,可提供1.8 mm的较短总长度和21.5 mm的焦距。发现所得到的镜头技术可以在物镜下以74倍的放大倍率和1.1μm的放大图像像素尺寸进行台式显微镜检查。它用于成像和评估钨阳极微焦点x射线源的焦点。在30 kV和10 mm焦距下,用钨阳极x射线管进行宽带照明的整体系统分辨率测得为2.30±0.22μm。

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