• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Advanced energy materials >Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery
【24h】

Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery

机译：芯片上3D锂离子全固态微电池功能层的原子层沉积

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Nowadays, millimeter scale power sources are key devices for providing autonomy to smart, connected, and miniaturized sensors. However, until now, planar solid state microbatteries do not yet exhibit a sufficient surface energy density. In that context, architectured 3D microbatteries appear therefore to be a good solution to improve the material mass loading while keeping small the footprint area. Beside the design itself of the 3D microbaterry, one important technological barrier to address is the conformal deposition of thin films (lithiated or not) on 3D structures. For that purpose, atomic layer deposition (ALD) technology is a powerful technique that enables conformal coatings of thin film on complex substrate. An original, robust, and highly efficient 3D scaffold is proposed to significantly improve the geometrical surface of miniaturized 3D microbattery. Four functional layers composing the 3D lithium ion microbattery stacking has been successfully deposited on simple and double microtubes 3D templates. In depth synchrotron X-ray nanotomography and high angle annular dark field transmission electron microscope analyses are used to study the interface between each layer. For the first time, using ALD, anatase TiO2 negative electrode is coated on 3D tubes with Li3PO4 lithium phosphate as electrolyte, opening the way to all solid-state 3D microbatteries. The surface capacity is significantly increased by the proposed topology (high area enlargement factor - thick 3D layer), from 3.5 A h cm(-2) for a planar layer up to 0.37 mA h cm(-2) for a 3D thin film (105 times higher).
机译：如今，毫米级电源是为智能，连接和小型化传感器提供自主性的关键设备。然而，直到现在，平面固态微电池还没有表现出足够的表面能密度。因此，在那种情况下，结构化3D微型电池似乎是提高材料质量负载同时保持较小的占地面积的良好解决方案。除了3D微阵列的设计本身之外，要解决的一个重要技术障碍是在3D结构上共形沉积薄膜（不论是否平版）。为此，原子层沉积（ALD）技术是一种强大的技术，可以在复杂的基板上进行保形的薄膜涂层。提出了一种原始，坚固且高效的3D支架，以显着改善小型3D微电池的几何表面。构成3D锂离子微电池堆叠的四个功能层已成功沉积在简单的双微管3D模板上。在深度同步加速器X射线纳米断层扫描和高角度环形暗场透射电子显微镜分析中，用于研究各层之间的界面。首次使用ALD将锐钛矿型TiO2负电极涂在3D管上，并以Li3PO4磷酸锂作为电解质，从而为所有固态3D微型电池开辟了道路。通过建议的拓扑结构（高面积扩大因子-厚3D层），表面电容显着增加，从平面层的3.5 A h cm（-2）到3D薄膜的0.37 mA h cm（-2）（高105倍）。

著录项

  • 来源
    《Advanced energy materials》 |2017年第2期|1601402.1-1601402.12|共12页
  • 作者

    Letiche Manon; Eustache Etienne; Freixas Jeremy; Demortiere Arnaud; De Andrade Vincent; Morgenroth Laurence; Tilmant Pascal; Vaurette Francois; Troadec David; Roussel Pascal; Brousse Thierry; Lethien Christophe;

  • 作者单位

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France|Univ Lille 1 Sci & Technol, UCCS, CNRS, UMR 81813, F-59655 Villeneuve Dascq, France|CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France|CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France|Univ Nantes, CNRS, Inst Mat Jean Rouxel, UMR 6502, 2 Rue Houssiniere,BP32229, F-44322 Nantes 3, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France|CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France|Univ Nantes, CNRS, Inst Mat Jean Rouxel, UMR 6502, 2 Rue Houssiniere,BP32229, F-44322 Nantes 3, France;

    CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France|Univ Picardie Jules Verne, LRCS, CNRS, UMR 7314, 100 Rue St Leu, F-80000 Amiens, France;

    Argonne Natl Lab, Adv Photon Sources Beam Line, Bldg 401 Rm A4115,9700 S Cass Ave, Argonne, IL 60439 USA;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France;

    Univ Lille 1 Sci & Technol, UCCS, CNRS, UMR 81813, F-59655 Villeneuve Dascq, France;

    CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France|Univ Nantes, CNRS, Inst Mat Jean Rouxel, UMR 6502, 2 Rue Houssiniere,BP32229, F-44322 Nantes 3, France;

    Univ Lille Sci & Technol, Inst Elect Microelect & Nanotechnol, CNRS, UMR 8520, BP60069, F-59652 Villeneuve Dascq, France|CNRS, FR 3459, Reseau Stockage Electrochim Energie, 33 Rue St Leu, F-80039 Amiens, France;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    3D microbatteries; atomic layer deposition; double microtubes; high areal capacity; solid electrolytes;

    机译：3D微电池;原子层沉积;双微管;高面容量;固体电解质;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号