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首页> 外文期刊>Advanced Functional Materials >Tailoring Vanadium Dioxide Film Orientation Using Nanosheets: a Combined Microscopy, Diffraction, Transport, and Soft X-Ray in Transmission Study
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Tailoring Vanadium Dioxide Film Orientation Using Nanosheets: a Combined Microscopy, Diffraction, Transport, and Soft X-Ray in Transmission Study

机译：使用纳米片量身定制二氧化钒薄膜的取向：透射研究中的组合显微镜，衍射，传输和软X射线

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摘要

Vanadium dioxide (VO2) is a much-discussed material for oxide electronics and neuromorphic computing applications. Here, heteroepitaxy of VO2 is realized on top of oxide nanosheets that cover either the amorphous silicon dioxide surfaces of Si substrates or X-ray transparent silicon nitride membranes. The out-of-plane orientation of the VO2 thin films is controlled at will between (011)(M1)/(110)(R) and (-402)(M1)/(002)(R) by coating the bulk substrates with Ti0.87O2 and NbWO6 nanosheets, respectively, prior to VO2 growth. Temperature-dependent X-ray diffraction and automated crystal orientation mapping in microprobe transmission electron microscope mode (ACOM-TEM) characterize the high phase purity, the crystallographic and orientational properties of the VO2 films. Transport measurements and soft X-ray absorption in transmission are used to probe the VO2 metal-insulator transition, showing results of a quality equal to those from epitaxial films on bulk single-crystal substrates. Successful local manipulation of two different VO2 orientations on a single substrate is demonstrated using VO2 grown on lithographically patterned lines of Ti0.87O2 and NbWO6 nanosheets investigated by electron backscatter diffraction. Finally, the excellent suitability of these nanosheet-templated VO2 films for advanced lensless imaging of the metal-insulator transition using coherent soft X-rays is discussed.
机译：二氧化钒（VO2）是用于氧化物电子学和神经形态计算应用的备受关注的材料。在这里，VO2的异质外延是在覆盖硅衬底的非晶态二氧化硅表面或X射线透明氮化硅膜的氧化物纳米片的顶部实现的。通过涂覆块状基板，将VO2薄膜的面外取向随意控制在（011）（M1）/（110）（R）和（-402）（M1）/（002）（R）之间VO2生长之前，分别用Ti0.87O2和NbWO6纳米片制备。在微探针透射电子显微镜模式（ACOM-TEM）中，与温度相关的X射线衍射和自动晶体取向图谱表征了VO2薄膜的高相纯度，晶体学和取向特性。传输过程中的传输测量和软X射线吸收被用来探测VO2金属-绝缘体的转变，显示出的质量与散装单晶衬底上的外延膜的质量相同。使用通过电子反向散射衍射研究的Ti0.87O2和NbWO6纳米片的光刻图案线上生长的VO2，可以证明在单个基板上成功实现了两种不同VO2取向的局部操纵。最后，讨论了这些纳米片模板的VO2膜对于使用相干软X射线对金属-绝缘体过渡层进行高级无透镜成像的出色适用性。

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