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Wafer-Scale High-Yield Manufacturing of Degradable Electronics for Environmental Monitoring

机译：晶圆级高产量可降解电子产品的环境监测

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摘要

Degradable electronics that dissolve or disintegrate in the environment after completing target functions are highly desirable due to great capabilities to eliminate the disposal, retrieval, and recycling of electronic waste worldwide. Constructing electronic systems on water-soluble substrates via transfer printing technology has emerged as a promising approach toward this goal. However, the current approach suffers from low yields and thus hinders the complexity and scale of the obtained system in practical applications. Here, a wafer-scale manufacturing process is proposed for degradable systems with high yields. As a demonstration, chips based on carbon nanotube thin films are 100% successfully transferred to water-soluble substrates with an average device yield of 96.6%. Great uniformity is also obtained in the transferred thin-film transistors (TFTs) and integrated circuits with a minimum standard deviation of 55 and 60 mV in the threshold voltage of TFTs and switching threshold voltage of inverters, respectively. System-level demonstration of real-time environmental monitoring is implemented in a simulated ecosystem together with a degradation demonstration under artificial rain. With its combined great performance, processing robustness, and high yields, this technology provides new opportunities for batch manufacturing of degradable electronics and next-generation ecofriendly sensing platforms for the coming Internet of Things era.
机译：由于具有消除世界范围内电子废物的处置，回收和再循环的强大能力，人们非常希望在完成目标功能后在环境中溶解或分解的可降解电子产品。通过转移印刷技术在水溶性基材上构建电子系统已成为实现该目标的一种有前途的方法。但是，当前的方法产量低，因此在实际应用中阻碍了所获得系统的复杂性和规模。在此，提出了一种用于高产量可降解系统的晶圆级制造工艺。作为演示，基于碳纳米管薄膜的芯片已成功地100％转移到水溶性基材上，平均器件产率为96.6％。在转移的薄膜晶体管（TFT）和集成电路中，在TFT的阈值电压和反相器的开关阈值电压中的最小标准偏差分别为55和60 mV，也获得了很高的均匀性。在模拟的生态系统中进行实时环境监测的系统级演示，并在人工降雨下进行退化演示。凭借其出色的性能，强大的处理能力和高产量，这项技术为即将到来的物联网时代的可降解电子产品和下一代环保传感器平台的批量生产提供了新的机会。

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