Recent Progress in Photonic Processing of Metal-Oxide Transistors

Emre Yarali; Christina Koutsiaki; Hendrik Faber; Kornelius Tetzner; Emre Yengel; Panos Patsalas; Nikolaos Kalfagiannis; Demosthenes C. Koutsogeorgis; Thomas D. Anthopoulos

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Recent Progress in Photonic Processing of Metal-Oxide Transistors

机译：金属氧化物晶体管光子处理的最新进展

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Abstract Over the past few decades, significant progress has been made in the field of photonic processing of electronic materials using a variety of light sources. Several of these technologies have now been exploited in conjunction with emerging electronic materials as alternatives to conventional high‐temperature thermal annealing, offering rapid manufacturing times and compatibility with temperature‐sensitive substrate materials among other potential advantages. Herein, recent advances in photonic processing paradigms of metal‐oxide thin‐film transistors (TFTs) are presented with particular emphasis on the use of various light source technologies for the photochemical and thermochemical conversion of precursor materials or postdeposition treatment of metal oxides and their application in thin‐film electronics. The pros and cons of the different technologies are discussed in light of recent developments and prospective research in the field of modern large‐area electronics is highlighted.

机译：摘要在过去几十年中，使用各种光源的电子材料的光子处理领域已经取得了重大进展。这些技术现在已经与新兴电子材料一起利用作为传统的高温热退火的替代品，提供快速制造时间和与温度敏感的衬底材料的兼容性等潜在的优点。这里，给出了金属氧化物薄膜晶体管（TFT）的光子处理范例的最新进展，特别强调使用各种光源技术用于前体材料的光化学和热化学转化或金属氧化物的后沉积处理及其应用在薄膜电子器件中。据突出了近期发展和前瞻性研究，讨论了不同技术的优缺点，突出了现代大面积电子领域。

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《Advanced Functional Materials》 |2020年第20期|1906022.1-1906022.37|共37页
作者
Emre Yarali; Christina Koutsiaki; Hendrik Faber; Kornelius Tetzner; Emre Yengel; Panos Patsalas; Nikolaos Kalfagiannis; Demosthenes C. Koutsogeorgis; Thomas D. Anthopoulos;
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作者单位

KAUST Solar Center (KSC);

Nottingham Trent University;

KAUST Solar Center (KSC);

Leibniz‐Institut für Höchstfrequenztechnik;

KAUST Solar Center (KSC);

Aristotle University of Thessaloniki;

Nottingham Trent University;

Nottingham Trent University;

KAUST Solar Center (KSC);

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原文格式 PDF
正文语种 eng
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关键词
flash lamps; laser processing; metal oxides; photonic processing; thin‐film transistors;

机译：闪光灯;激光加工;金属氧化物;光子加工;薄膜晶体管;

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1. Solution-processed Pb_(0.8)Ba_(0.2)ZrO_3 as a gate dielectric for low-voltage metal-oxide thin-film transistor [J] . Vishwas Acharya, Anand Sharma, Nitesh K. Chourasia, Emergent Materials . 2020,第1期

机译：溶液处理的Pb_（0.8）Ba_（0.2）ZrO_3作为低压金属氧化物薄膜晶体管的栅极电介质
2. A hardwired machine learning processing engine fabricated with submicron metal-oxide thin-film transistors on a flexible substrate [J] . Emre Ozer, Jedrzej Kufel, James Myers, Nature Electronics . 2020,第7期

机译：用亚微米金属氧化物薄膜晶体管制造的硬连线机学习加工发动机在柔性基板上
3. Solution-processed metal-oxide thin-film transistors: a review of recent developments [J] . Chen Rongsheng, Lan Linfeng Nanotechnology . 2019,第31期

机译：溶液加工的金属氧化物薄膜晶体管：近期发展的综述
4. Effective conversion processes of metal-oxide precursors for the reduction of the conversion temperature in solution processed metal-oxide thin-film transistors [C] . Claudia Bock, Ersoy Subasi, Maren Kasischke, GMM-Workshop Mikro-Nano-Integration . 2018

机译：用于减少溶液加工金属氧化物薄膜晶体管转化温度的金属氧化物前体的有效转化过程
5. Understanding the Enhanced Mobility of Solution-Processed Metal-Oxide Thin-Film Transistors Having High-k Gate Dielectrics. [D] . Zeumault, Andre. 2017

机译：了解具有高k栅极介电常数的固溶处理金属氧化物薄膜晶体管的迁移率。
6. Self-Aligned Top-Gate Metal-Oxide Thin-Film Transistors Using a Solution-Processed Polymer Gate Dielectric [O] . Seungbeom Choi, Seungho Song, Taegyu Kim, 2020

机译：使用溶液加工的聚合物栅极电介质自对准顶栅金属氧化物薄膜晶体管
7. Self-Aligned Top-Gate Metal-Oxide Thin-Film Transistors Using a Solution-Processed Polymer Gate Dielectric [O] . Seungbeom Choi, Seungho Song, Taegyu Kim, 2020

机译：使用溶液加工的聚合物栅极电介质自对准顶栅金属氧化物薄膜晶体管

Recent Progress in Photonic Processing of Metal-Oxide Transistors

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