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Green Lithography for Delicate Materials

机译：精致材料的绿色光刻

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摘要

A variety of unconventional materials, including biological nanostructures, organic and hybrid semiconductors, as well as monolayer, and other low-dimensional systems, are actively explored. They are usually incompatible with standard lithographic techniques that use harsh organic solvents and other detrimental processing. Here, a new class of green and gentle lithographic resists, compatible with delicate materials and capable of both top-down and bottom-up fabrication routines is developed. To demonstrate the excellence of this approach, devices with sub-micron features are fabricated on organic semiconductor crystals and individual animal's brain microtubules. Such structures are created for the first time, thanks to the genuinely water-based lithography, which opens an avenue for the thorough research of unconventional delicate materials at the nanoscale.
机译：主动探索各种非传统材料，包括生物纳米结构，有机和杂种半导体，以及单层等低维系统。 它们通常与使用苛刻的有机溶剂和其他有害加工的标准光刻技术不相容。 在这里，开发了一种新的绿色和温和平版抗性，兼容精致材料并能够进行自上而下和自下而上的制造例程。 为了证明这种方法的卓越，在有机半导体晶体和个体动物的脑微管上制造具有亚微米特征的装置。 由于真正的水性光刻，这是第一次创建的这种结构，它为纳米尺度开辟了对非常规精致材料的彻底研究的途径。

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  • 来源
    《Advanced Functional Materials》 |2021年第27期|2101533.1-2101533.10|共10页
  • 作者

    Grebenko Artem; Bubis Anton; Motovilov Konstantin; Dremov Viacheslav; Korostylev Evgeny; Kindiak Ivan; Fedorov Fedor S.; Luchkin Sergey; Zhuikova Yuliya; Trofimenko Aleksandr; Filkov Gleb; Sviridov Georgiy; Ivanov Andrey; Dull Jordan T.; Mozhchil Rais; Ionov Andrey; Varlamov Valery; Rand Barry P.; Podzorov Vitaly; Nasibulin Albert G.;

  • 作者单位

    Skolkovo Inst Sci & Technol Nobel Str 3 Moscow 121205 Russia|Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Skolkovo Inst Sci & Technol Nobel Str 3 Moscow 121205 Russia|RAS Inst Solid State Phys Acad Ossipyan Str 2 Moscow 142432 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Skolkovo Inst Sci & Technol Nobel Str 3 Moscow 121205 Russia;

    Skolkovo Inst Sci & Technol Nobel Str 3 Moscow 121205 Russia;

    Russian Acad Sci Biotechnol Res Ctr Inst Bioengn Leninsky Ave 33 Bld 2 Moscow 119071 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Moscow Inst Phys & Technol Inst Lane 9 Moscow 141701 Russia;

    Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

    Princeton Univ Dept Elect Engn Princeton NJ 08544 USA;

    RAS Inst Solid State Phys Acad Ossipyan Str 2 Moscow 142432 Russia|Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

    RAS Inst Solid State Phys Acad Ossipyan Str 2 Moscow 142432 Russia;

    Russian Acad Sci Biotechnol Res Ctr Inst Bioengn Leninsky Ave 33 Bld 2 Moscow 119071 Russia;

    Princeton Univ Dept Elect Engn Princeton NJ 08544 USA|Princeton Univ Andlinger Ctr Energy & Environm Princeton NJ 08544 USA;

    Rutgers State Univ Dept Phys & Astron Piscataway NJ 08854 USA;

    Skolkovo Inst Sci & Technol Nobel Str 3 Moscow 121205 Russia|Aalto Univ POB 16100 FI-00076 Aalto Finland;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    bio-nanostructures; delicate materials; lithography; organic semiconductors;

    机译：生物纳米结构;精致的材料;光刻;有机半导体;

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