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Rational and Facile Construction of 3D Annular Nanostructures with Tunable Layers by Exploiting the Diffraction and Interference of Light

机译:通过利用光的衍射和干涉来合理,方便地构建具有可调谐层的3D环形纳米结构。

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摘要

This paper reports a rational and facile approach to fabricating arrays of 3D annular nanostructures with tunable layers by utilizing the diffraction and interference of UV light. Based on discretized Fresnel bright spots and standing waves formed within a photoresist film, the structures with nanoscale features are realized using simple, conventional photolithography. The 3D annular nanostructures are produced in arrays of single-, double-, and triple-layered ring structures with the height of single layer on a 100 nm scale. The structural formation process and features of the nanostructures are analyzed and explained through 3D modeling that integrates the effects of both UV exposure dose and chemical kinetics. The approach to generating 3D annular nanostructures with tunable layers and discrete heights can be adapted for various applications that require the 3D structures fabricated over a large area with high throughput.
机译:本文报道了一种利用紫外线的衍射和干涉来制造具有可调谐层的3D环形纳米结构阵列的合理而便捷的方法。基于离散的菲涅耳亮点和在光刻胶膜内形成的驻波,可以使用简单的常规光刻技术来实现具有纳米级特征的结构。 3D环形纳米结构以单层,双层和三层环形结构的阵列形式生产,单层高度为100 nm。通过3D建模分析和解释了纳米结构的结构形成过程和特征,该模型集成了UV暴露剂量和化学动力学的影响。产生具有可调节层和离散高度的3D环形纳米结构的方法可以适用于需要在大面积上以高通量制造3D结构的各种应用。

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  • 来源
    《Advanced Functional Materials》 |2016年第29期|5203-5210|共8页
  • 作者单位

    Korea Univ, Dept Phys, Seoul 02841, South Korea;

    Korea Univ, Dept Phys, Seoul 02841, South Korea;

    Korea Res Inst Stand & Sci, Ctr Nanobio Measurement, Daejeon 34113, South Korea;

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