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High Quality Carbon Nanotubes on Conductive Substrates Grown at Lown Temperatures

机译:在低温下生长的导电基底上的高质量碳纳米管

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摘要

For carbon nanotubes (CNTs) to be exploited in electronic applications, the growth of high quality material on conductive substrates at low temperatures (<450 degrees C) is required. CNT quality is known to be strongly degraded when growth is conducted on metallic surfaces, particularly at low temperatures using conventional chemical vapor deposition (CVD). Here, the production of high quality vertically-aligned CNTs at low substrate temperatures (350-440 degrees C) on conductive TiN thin film u
机译:对于要在电子应用中使用的碳纳米管(CNT),需要在低温(<450摄氏度)的导电基板上生长高质量的材料。当在金属表面上进行生长时,尤其是在低温下使用常规化学气相沉积(CVD)进行生长时,CNT质量会大大降低。在这里,在低衬底温度(350-440摄氏度)下在导电TiN薄膜u上生产高质量的垂直排列的CNT

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