'Layer-Filter Threshold' Technique for Near-Infrared Laser Ablation inn   Organic Semiconductor Device Processing

Ye Feng; Chen Zhaobin; Zhao Xiaoli; Chen Jiayue; Yang Xiaoniu

首页> 外文期刊>Advanced Functional Materials >'Layer-Filter Threshold' Technique for Near-Infrared Laser Ablation inn Organic Semiconductor Device Processing

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'Layer-Filter Threshold' Technique for Near-Infrared Laser Ablation inn Organic Semiconductor Device Processing

机译：有机半导体器件加工中近红外激光烧蚀的“层滤阈值”技术

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摘要

Although conventional laser ablation (CLA) method has widely been used in patterning of organic semiconductor thin films, its quality control still remains unsatisfied due to the ambiguous photochemical and photothermal processes. Based on industrial available near-infrared laser source, herein, a novel layer-filter threshold (LFT) technique is proposed, which involves the decomposition of targeted layer-filter and subsequent explosive evaporation process to purge away the upper layers instead o

机译：尽管传统的激光烧蚀（CLA）方法已广泛用于有机半导体薄膜的构图，但由于光化学和光热工艺的含糊不清，其质量控制仍不令人满意。本文基于工业上可用的近红外激光源，提出了一种新的层滤阈值（LFT）技术，该技术涉及目标层滤膜的分解和随后的爆炸蒸发过程，以清除上层物质，而不是将其去除。

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来源
《Advanced Functional Materials》 |2015年第28期|4453-4461|共9页
作者
Ye Feng; Chen Zhaobin; Zhao Xiaoli; Chen Jiayue; Yang Xiaoniu;
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作者单位

Univ Chinese Acad Sci, Beijing 100049, Peoples R China.;

Chinese Acad Sci, Changchun Inst Appl Chem, Polymer Composites Engn Lab, Changchun 130022, Peoples R China.;

Chinese Acad Sci, Changchun Inst Appl Chem, Polymer Composites Engn Lab, Changchun 130022, Peoples R China.;

Univ Chinese Acad Sci, Beijing 100049, Peoples R China.;

Chinese Acad Sci, Changchun Inst Appl Chem, Polymer Composites Engn Lab, Changchun 130022, Peoples R China.;

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原文格式 PDF
正文语种 eng
中图分类
关键词
device processing; layer-filter; near-infrared laser ablation; self-alignment;

机译：器件处理;滤光片;近红外激光烧蚀;自对准;

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1. Generation of InN nanocrystals in organic solution through laser ablation of high pressure chemical vapor deposition-grown InN thin film [J] . Alkis S., Alevli M., Burzhuev S., Journal of nanoparticle research: An interdisciplinary forum for nanoscale science and technology . 2012,第8期

机译：通过激光烧蚀高压化学气相沉积生长的InN薄膜在有机溶液中生成InN纳米晶体
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机译：通过激光烧蚀高压化学气相沉积生长的InN薄膜在有机溶液中生成InN纳米晶体
3. Solution-processed electrical doping of organic semiconductors and their application for organic devices [J] . Gunel Huseynova Material Science & Engineering International Journal . 2019,第3期

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7. Organic Semiconductor Lasers: Lasing Operation under Long‐Pulse Excitation in Solution‐Processed Organic Gain Medium: Toward CW Lasing in Organic Semiconductors (Advanced Optical Materials 21/2020) [O] . Van T. N. Mai, Atul Shukla, A. M. Chathuranganie Senevirathne, 2020

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'Layer-Filter Threshold' Technique for Near-Infrared Laser Ablation inn Organic Semiconductor Device Processing

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