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Epitaxy on Demand

机译：按需外延

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Perovskite oxide heteroepitaxy is realized on the top of inorganic nanosheets that are covering the amorphous oxide surfaces of Si substrates. Utilizing pulsed laser deposition, thin films of SrRuO3 in a (001)(pc) and (110)(pc) orientation on nanosheets of Ca2Nb3O10 and Ti0.87O2 are grown, respectively. The two types of nanosheets are patterned to locally tailor the crystallographic orientation and properties of SrRuO3. The success of our approach is demonstrated by electron backscatter diffraction and spatial magnetization maps. An unprecedented control of perovskite film growth on arbitrary substrates is illustrated in this work, and the methods that are developed to deposit SrRuO3 thin films are a viable starting point for growth of artificial heteroepitaxial thin films that require a bottom electrode. Control is not just reached in the direction of film growth, as the crystal orientation and film properties are regulated laterally on the surface of micropatterned nanosheets. Local control of magnetic properties is illustrated, which holds out prospects for the fabrication of next-generation devices like noncollinear magnetic random access memories.
机译：钙钛矿氧化物的异质外延是在覆盖硅衬底的非晶氧化物表面的无机纳米片的顶部实现的。利用脉冲激光沉积，分别在Ca2Nb3O10和Ti0.87O2纳米片上以（001）（pc）和（110）（pc）取向生长SrRuO3薄膜。对两种类型的纳米片进行构图以局部调整SrRuO3的晶体学取向和性质。电子背散射衍射和空间磁化图证明了我们方法的成功。这项工作说明了钙钛矿膜在任意基材上生长的空前控制，开发出的沉积SrRuO3薄膜的方法是生长需要底部电极的人工异质外延薄膜的可行起点。不仅可以在薄膜生长方向上实现控制，还可以在微图案化纳米片的表面上横向调节晶体取向和薄膜性能。说明了磁特性的局部控制，这为制造下一代设备（如非共线磁性随机存取存储器）提供了前景。

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