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首页> 外文期刊>Advanced Functional Materials >Fully Patterned Low-Voltage Transparent Metal Oxide Transistors Deposited Solely by Chemical Spray Pyrolysis
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Fully Patterned Low-Voltage Transparent Metal Oxide Transistors Deposited Solely by Chemical Spray Pyrolysis

机译：通过化学喷雾热解法完全沉积的全图案化低压透明金属氧化物晶体管

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摘要

All-inorganic transparent thin-film transistors deposited solely by the solution processing method of spray pyrolysis are reported. Different precursor materials are employed to create conducting and semiconducting species of ZnO acting as electrodes and active channel material, respectively, as well as zirconium oxide as gate dielectric layer. Additionally, a simple stencil mask system provides sufficient resolution to realize the necessary geometric patterns.As a result, fully functional low-voltage n-type transistors with a mobility of 0.18 cm~2 V~(-1) s~(-1) can be demonstrated via a technique that bears the potential for upscaling. A detailed microscopic evaluation of the channel region by electron diffraction, high-resolution and analytical TEM confirms the layer stacking and provides detailed information on the chemical composition and nanocrystalline nature of the individual layers.
机译：报道了仅通过喷雾热解的溶液处理方法沉积的全无机透明薄膜晶体管。采用不同的前驱物材料来创建分别用作电极和有源沟道材料的ZnO的导电和半导电物质，以及用作栅极介电层的氧化锆。此外，一个简单的模板掩模系统可提供足够的分辨率来实现必要的几何图案，因此，迁移率达到0.18 cm〜2 V〜（-1）s〜（-1）的全功能低压n型晶体管可以通过具有扩大规模潜力的技术进行演示。通过电子衍射，高分辨率和分析型TEM对通道区域进行的详细微观评估，确认了层堆叠，并提供了有关各个层的化学组成和纳米晶体性质的详细信息。

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  • 来源
    《Advanced Functional Materials》 |2013年第22期|2828-2834|共7页
  • 作者

    Hendrik Faber; Benjamin Butz; Christel Dieker; Erdmann Spiecker; Marcus Halik;

  • 作者单位

    Organic Materials & Devices Dept. of Materials Science University Erlangen-Nuernberg Martensstrasse 07, 91058 Erlangen, Germany;

    Center for Nanoanalysis and Electron Microscopy (CENEM)Dept. of Materials Science University Erlangen-Nuernberg Cauerstrasse 06, 91058 Erlangen, Germany;

    Center for Nanoanalysis and Electron Microscopy (CENEM)Dept. of Materials Science University Erlangen-Nuernberg Cauerstrasse 06, 91058 Erlangen, Germany;

    Center for Nanoanalysis and Electron Microscopy (CENEM)Dept. of Materials Science University Erlangen-Nuernberg Cauerstrasse 06, 91058 Erlangen, Germany;

    Organic Materials & Devices Dept. of Materials Science University Erlangen-Nuernberg Martensstrasse 07, 91058 Erlangen, Germany;

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