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Chemically Homogeneous Complex Oxide Thin Films Via Improved Substrate Metallization

机译：通过改进的基板金属化化学均质复合氧化物薄膜

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摘要

A long-standing challenge to the widespread application of complex oxide thin films is the stable and robust integration of noble metal electrodes, such as platinum, which remains the optimal choice for numerous applications. By considering both work of adhesion and stability against chemical diffusion, it is demonstrated that the use of an improved adhesion layer (namely, ZnO) between the silicon substrate and platinum bottom electrode enables dramatic improvements in the properties of the overlying functional oxide films. Using BaTiO_3 and Pb(Zr,Ti)O_3 films as test cases, it is shown that the use of ZnO as the adhesion layer leads directly to increased process temperature capabilities and dramatic improvements in chemical homogeneity of the films. These result in significant property enhancements (e.g., 300% improvement to bulk-like permittivity for the BaTiO_3 films) of oxide films prepared on Pt/ZnO as compared to the conventional Pt/Ti and Pt/TiO_x stacks. A comparison of electrical, structural, and chemical properties that demonstrate the impact of adhesion layer chemistry on the chemical homogeneity of the overlying complex oxide is presented. Collectively, this analysis shows that in addition to the simple need for adhesion, metal-oxide layers between noble metals and silicon can have tremendous chemical impact on the terminal complex oxide layers.
机译：对于复杂氧化物薄膜的广泛应用而言，长期存在的挑战是贵金属电极（例如铂）的稳定和坚固集成，这仍然是众多应用的最佳选择。通过同时考虑粘附功和对化学扩散的稳定性，证明了在硅衬底和铂底电极之间使用改进的粘附层（即，ZnO）能够显着改善上覆的功能氧化物膜的性能。使用BaTiO_3和Pb（Zr，Ti）O_3薄膜作为测试案例，结果表明，使用ZnO作为粘合层直接提高了工艺温度的能力并大大改善了薄膜的化学均匀性。与常规的Pt / Ti和Pt / TiO_x叠层相比，这些导致在Pt / ZnO上制备的氧化物膜的显着性能增强（例如，BaTiO_3膜的块状介电常数提高300％）。进行了电，结构和化学性质的比较，证明了粘附层化学性质对上层复合氧化物化学均匀性的影响。总体而言，该分析表明，除了简单地需要粘附之外，贵金属和硅之间的金属氧化物层可能会对末端复合氧化物层产生巨大的化学影响。

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  • 来源
    《Advanced Functional Materials》 |2012年第11期|p.2295-2302|共8页
  • 作者

    Christopher T. Shelton; Paul G. Kotula; Geoff L. Brennecka; Peter C. Lam; Kelsey E. Meyer; Jon-Paul Maria; Brady J. Gibbons; Jon F. Ihlefeld;

  • 作者单位

    Materials Science and Engineering Center Sandia National Laboratories Albuquerque, NM, 87185, USA;

    Materials Science and Engineering Center Sandia National Laboratories Albuquerque, NM, 87185, USA;

    Materials Science and Engineering Center Sandia National Laboratories Albuquerque, NM, 87185, USA;

    Department of Materials Science and Engineering North Carolina State University Raleigh, NC, 27695, USA;

    Materials Science and Engineering Center Sandia National Laboratories Albuquerque, NM, 87185, USA;

    Department of Materials Science and Engineering North Carolina State University Raleigh, NC, 27695, USA;

    Materials Science, School of Mechanical, Industrial, and Manufacturing Engineering Oregon State University Corvallis, OR, 97331, USA;

    Materials Science and Engineering Center Sandia National Laboratories Albuquerque, NM, 87185, USA;

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