Nanoscale Characterization of Energy Generation from Piezoelectric Thin Films

Madhu Bhaskamn; Sharath Sri ram; Simon Ruffell; Arnan Mitchell

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Nanoscale Characterization of Energy Generation from Piezoelectric Thin Films

机译：压电薄膜产生能量的纳米尺度表征

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We report on the use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films. This work presents the controlled observation of nanoscale piezoelectric voltage and current generation, allowing accurate quantification and mapping of force function variations. We characterize both continuous thin films and lithographically patterned nano-islands with constrained interaction area. The influence of size on energy generation parameters is reported, demonstrating that nanoislands can exhibit more effective current generation than continuous films. This quantitative finding suggests that further research into the impact of nanoscale patterning of piezoelectric thin films may yield an improved materials platform for integrated microscale energy scavenging systems.

机译：我们报道了使用纳米压痕法原位表征压电薄膜的电压和电流生成。这项工作提出了对纳米级压电电压和电流产生的受控观察，从而可以对力函数变化进行精确的量化和映射。我们表征了连续薄膜和具有受限相互作用区域的光刻图案化纳米岛。报告了尺寸对能量产生参数的影响，表明纳米岛比连续膜可以显示出更有效的电流产生。这一定量发现表明，对压电薄膜的纳米级图案影响的进一步研究可能会为集成的微尺度能量清除系统提供一个改进的材料平台。

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《Advanced Functional Materials》 |2011年第12期|p.2251-2257|共7页
作者
Madhu Bhaskamn; Sharath Sri ram; Simon Ruffell; Arnan Mitchell;
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School of Electrical and Computer Engineering RMIT University GPO Box 2476, Melbourne, Victoria 3001, Australia;

School of Electrical and Computer Engineering RMIT University GPO Box 2476, Melbourne, Victoria 3001, Australia;

Department of Electronic Materials Engineering Research School of Physics and Engineering Australian National University Australian Capital Territory 0200, Australia;

School of Electrical and Computer Engineering RMIT University GPO Box 2476, Melbourne, Victoria 3001, Australia;

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Nanoscale Characterization of Energy Generation from Piezoelectric Thin Films

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