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The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography

机译:激光干涉光刻技术制备二维聚合物结构的弹性和塑性行为

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摘要

The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes. (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern.
机译:介绍了通过干涉光刻技术制造的具有六重对称性的二维聚合物(SU8)结构内的弹性和塑性特性。弹性模量存在不均匀的空间分布,节点的弹性模量更高。 (在激光干涉图案中最亮的区域)(激光干涉图案中最亮的区域)和较低的弹性模量(在激光干涉图案中最暗的区域)。我们建议这种不均匀性和异常的塑性行为与干涉图案“烙印”的可变材料特性有关。

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