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首页> 外文期刊>Advanced Functional Materials >Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O-3 thick films and determination of their electromechanical characteristics
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Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O-3 thick films and determination of their electromechanical characteristics

机译：压电Pb（Zr0.52Ti0.48）O-3厚膜驱动的微悬臂梁传感器的制备及其机电特性的确定

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摘要

ne integration and the device realization of Pb(Zr,Ti)O-3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick-film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O-3 thick-film cantilever devices are successfully fabricated on a Pt/TiO2/SiNx/Si substrate using a screen-printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 +/- 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d(31), of -20.7 to -18.8 pCN(-1) is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick-film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick-film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real-time recognition of biomolecules using PZT thick-film cantilevers.
机译：由于PZT厚膜的加工温度接近Si的熔点，因此在Si衬底上进行Pb（Zr，Ti）O-3（PZT）厚膜的集成和器件实现非常困难。但是，Si上的PZT厚膜器件非常适合生物传感器，因此值得关注。它们产生较大的驱动力，并且对于质量检测（尤其是在液体中）具有相对较高的灵敏度。在这项研究中，使用丝网印刷方法和微机电系统（MEMS）工艺成功地在Pt / TiO2 / SiNx / Si衬底上制造了Pb（Zr0.52Ti0.48）O-3厚膜悬臂器件。弹性和机电性能（例如杨氏模量和横向压电系数）是通过微观结构和电学分析确定的，以进行进一步的力学研究。计算出的厚膜的杨氏模量为53.9 +/- 3.85 GPa，对应于从测得的谐波振荡响应获得的谐振频率。 -20.7至-18.8 pCN（-1）的横向压电常数d（31）与致密薄膜相当。这些值有望通过设计厚膜悬臂的结构，然后模拟谐波振荡响应来确定其厚度。使用PZT厚膜悬臂，在水中展示出质量因子（Q）约为23的强谐波振荡。在液体中观察到强谐波振荡意味着使用PZT厚膜悬臂梁精确实时识别生物分子的可行性。

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