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首页> 外文期刊>Advanced Materials for Optics and Electronics >Impurity Survey Analysis of Cd_xHg_(1-x) Te by Laser Scan Mass Spectrometry
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Impurity Survey Analysis of Cd_xHg_(1-x) Te by Laser Scan Mass Spectrometry

机译：激光扫描质谱法分析Cd_xHg_（1-x）Te的杂质

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摘要

A laser scan mass spectrometry (LSMS) technique has been applied to the analysis of epitaxial layers and bulk Cd_xHg_(1-x)Te (CMT) materials. The samples are raster scanned under a focused Q-switched Nd-YAG laser beam which ionises all elements with approximately unit sensitivity. The ions are extracted into a high-resolution mass spectrometer and interpretation of the mass spectra gives a complete impurity survey of the material with detection limits down to 1 part in 10~9 (3 x 10~(13) cm~(-1) in bulk materials and 5 parts in 10~9 in epitaxial layers. Surface impurities are effectively removed in the first scan and subsequent scans over the same area give a true measurement of the impurities present in the material. Successive erosion of the sample surface gives impurity depth profiles with the thickness of material eroded in each scan variable between 1 and 4 μm. Results are given for impurities found in bulk CMT grown by standard Bridgman and ACRT (accelerated crucible rotation technique) processes and in epitaxial CMT produced by liquid phase epitaxy (LPE), metal organic vapour phase epitaxy (MOVPE) and molecular beam epitaxy (MBE). Bulk material is shown to be purer in general than epitaxial material. Semiquantitative depth profiles of dopants in CMT, such as iodine, arsenic and phosphorus, can also be obtained and comparative LSMS and secondary ion mass spectrometry (SIMS) depth profiles showing good agreement are given for arsenic in an MOVPE layer.
机译：激光扫描质谱（LSMS）技术已应用于外延层和Cd_xHg_（1-x）Te（CMT）材料的分析。样品在聚焦的Q开关Nd-YAG激光束下进行光栅扫描，该激光束以大约单位灵敏度电离所有元素。离子被提取到高分辨率质谱仪中，质谱的解释给出了对材料的完整杂质检测，检测限在10〜9（3 x 10〜（13）cm〜（-1）内低至1份在散装材料中，外延层中10〜9中有5份，表面杂质在第一次扫描中被有效去除，随后在同一区域进行扫描，可以真实测量材料中存在的杂质，样品表面的连续腐蚀会产生杂质深度分布图，每个扫描变量的材料厚度在1-4μm之间变化。给出了通过标准Bridgman和ACRT（加速坩埚旋转技术）工艺生长的块状CMT和液相外延生产的外延CMT中发现的杂质的结果（ LPE），金属有机气相外延（MOVPE）和分子束外延（MBE）。散装材料通常比外延材料更纯净； CMT中掺杂剂的半定量深度分布，例如还可以得到碘，砷和磷（例如碘，磷和磷），并给出了MOVPE层中砷的比较LSMS和二次离子质谱（SIMS）深度分布，表明了良好的一致性。

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