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Fabrication of 3D Microstructures from Interactions of Immiscible Liquids with a Structured Surface

机译：从具有结构化表面的不溶混液体的相互作用制备3D微观结构

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摘要

Three-dimensional (3D) micrometer-sized structures have found widespread application in microelectronics, photonics, and biotechnology. Conventional microfabrication techniques, particularly photolithography and soft lithography, are well-suited to the production of two-dimensional (2D) micro-structures with precisely controlled patterns along an x- and y-axis. Rudimentary three-dimensional (3D) structures can be formed by projecting these 2D patterns some fixed distance along a z-axis. Truly complex 3D microstructures, however, require specialized extensions of these methods or other independent techniques. Photolithographic strategies such as gray-scale photolithography, multiphoton lithography, and interference lithography fabricate high resolution 3D structures, but generally require light-activated materials and sophisticated infrastructure. Direct layer-by-layer placement or removal of materials, for example, stereolithography, 3D printing, and laser ablation, typically exhibit low feature resolution, low throughput, or require specialized and expensive instrumentation. Here we present a strategy termed liquid lithography which, using no pattern-alignment steps or dedicated equipment, can nevertheless rapidly and efficiently construct intricate 3D assemblies.
机译：三维（3D）微米大小的结构已在微电子学，光子学和生物技术中得到广泛应用。传统的微加工技术，特别是光刻和软光刻技术，非常适合于生产二维（2D）微结构，并沿x和y轴进行精确控制。可以通过将这些2D图案沿z轴投影固定距离来形成基本的三维（3D）结构。但是，真正复杂的3D微结构需要这些方法或其他独立技术的专门扩展。诸如灰度光刻，多光子光刻和干涉光刻之类的光刻策略可制造高分辨率3D结构，但通常需要光激活的材料和复杂的基础结构。直接逐层放置或移除材料（例如，立体光刻，3D打印和激光烧蚀）通常显示出低特征分辨率，低通量，或者需要专门且昂贵的仪器。在这里，我们提出一种称为液体光刻的策略，该方法无需使用图案对准步骤或专用设备，就可以快速而有效地构造复杂的3D组件。

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  • 来源
    《Advanced Materials》 |2013年第30期|4107-4112|共6页
  • 作者

    Joseph J. Balowski; Yuli Wang; Nancy L. Allbritton;

  • 作者单位

    Department of Biomedical Engineering University of North Carolina Chapel Hill, NC 27599 and North Carolina State University Raleigh, NC 27695, USA,Department of Chemistry University of North Carolina Chapel Hill, NC 27599, USA;

    Department of Biomedical Engineering University of North Carolina Chapel Hill, NC 27599 and North Carolina State University Raleigh, NC 27695, USA,Department of Chemistry University of North Carolina Chapel Hill, NC 27599, USA;

    Department of Biomedical Engineering University of North Carolina Chapel Hill, NC 27599 and North Carolina State University Raleigh, NC 27695, USA,Department of Chemistry University of North Carolina Chapel Hill, NC 27599, USA;

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