...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Advanced Materials >Directional Photofluidization Lithography: Micro/Nanostructural Evolution by Photofluidic Motions of Azobenzene Materials
【24h】

Directional Photofluidization Lithography: Micro/Nanostructural Evolution by Photofluidic Motions of Azobenzene Materials

机译：定向光流化平版印刷术：偶氮苯材料的光流运动引起的微观/纳米结构演变

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This review demonstrates directional photofluidization lithography (DPL), which makes it possible to fabricate a generic and sophisticated micro/ nanoarchitecture that would be difficult or impossible to attain with other methods. In particular, DPL differs from many of the existing microano-fabrication methods in that the post-treatment (i.e., photofluidization), after the preliminary fabrication process of the original microanostructures, plays a pivotal role in the various microanostructural evolutions including the deterministic reshaping of architectures, the reduction of structural roughness, and the dramatic enhancement of pattern resolution. Also, DPL techniques are directly compatible with a parallel and scalable microano-fabrication. Thus, DPL with such extraordinary advantages in microano-fabrication could provide compelling opportunities for basic microanoscale science as well as for general technology applications.
机译：这篇综述展示了定向光流化光刻技术（DPL），它使制造通用，复杂的微/纳米体系结构成为可能，而这是其他方法难以或不可能实现的。特别地，DPL与许多现有的微/纳米加工方法的不同之处在于，在原始微/纳米结构的初步制造过程之后，后处理（即光流化）在各种微/纳米结构中起着举足轻重的作用。发展包括确定性地重塑体系结构，减少结构粗糙度以及显着提高图案分辨率。而且，DPL技术与并行且可扩展的微/纳米加工直接兼容。因此，在微/纳米加工中具有如此卓越优势的DPL可以为基础的微/纳米尺度科学以及一般技术应用提供令人信服的机会。

著录项

  • 来源
    《Advanced Materials》 |2012年第16期|p.2069-2103|共35页
  • 作者

    Seungwoo Lee; Hong Suk Kang; Jung-Ki Park;

  • 作者单位

    Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon, 305-701, Korea,Department of Chemical and Biomolecular Engineering Korea Advanced Institute of Science and Technology (KAIST)Daejeon, 305-701, Korea;

    Graduate School of EEWS Korea Advanced Institute of Science and Technology (KAIST) Daejeon, 305-701, Korea;

    Graduate School of EEWS Korea Advanced Institute of Science and Technology (KAIST) Daejeon, 305-701, Korea,Department of Chemical and Biomolecular Engineering Korea Advanced Institute of Science and Technology (KAIST)Daejeon, 305-701, Korea;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号