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首页> 外文期刊>Advanced Materials >Thermochemical Patterning of Polymer Thin Films With Tunable Size-Reduction Effects Using Metal-Coated Poly(dimethylsiloxane) Stamps
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Thermochemical Patterning of Polymer Thin Films With Tunable Size-Reduction Effects Using Metal-Coated Poly(dimethylsiloxane) Stamps

机译：具有金属涂层的聚（二甲基硅氧烷）压模的具有可调尺寸减小效果的聚合物薄膜的热化学构图

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摘要

There is a growing interest in exploring novel patterning methods beyond conventional photolithography. Although this technology is specialized for use in microelectronics and is arguably as important in terms of impact on society as other inventions such as the wheel, bronze, or movable vehicles, it does have some limitations, such as high operational costs, incompatibility with curved surfaces, poor suitability for 3D fabrication, and exclusive application in the direct patterning of a limited set of functional materials, such as photoresists. These limitations have created substantial interest in exploring alternative techniques, such as those based on certain types of contact printing, molding, embossing, and writing. Amongst the numerous novel nano-fabrication techniques, soft lithography has great potential for the patterning of soft matter.
机译：人们对探索超越传统光刻技术的新型构图方法的兴趣与日俱增。尽管该技术专门用于微电子学，并且在对社会的影响方面可以说与其他发明（例如轮毂，青铜或可移动车辆）一样重要，但它确实存在一些局限性，例如较高的运营成本，与曲面的不兼容性，对于3D制造的适应性差，并且仅在有限的一组功能材料（例如光致抗蚀剂）的直接图案化中独占应用。这些局限性引起了人们对探索替代技术的极大兴趣，例如基于某些类型的接触印刷，成型，压花和书写的替代技术。在众多新颖的纳米制造技术中，软光刻技术具有巨大的潜力，可以对软物质进行构图。

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  • 来源
    《Advanced Materials》 |2009年第21期|2211-2215|共5页
  • 作者

    Fangfang Wang; Mianqi Xue; Tingbing Cao;

  • 作者单位

    Department of Chemistry Renmin University of China Beijing, 100872 (P.R. China);

    Department of Chemistry Renmin University of China Beijing, 100872 (P.R. China);

    Department of Chemistry Renmin University of China Beijing, 100872 (P.R. China);

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  • 正文语种 eng
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