Diamond Milling of Micro-Optics

Sweatt W.C.; Gill D.D.; Adams D.P.; Vasile M.; Claudet A.A.

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Diamond Milling of Micro-Optics

机译：微光学钻石铣削

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A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples will be presented and the optical performance of an array of micro-lenses will be described.

机译：金刚石铣刀（微小的立铣刀）可以切割直径小于0.5毫米的非球面镜片和镜子。切割工具具有二维形状，并且围绕要切割的表面的轴线旋转。当旋转工具插入基板时，它会切割出一个径向对称的表面以达到亚微米精度。可使用聚焦离子束将市售圆形金刚石工具修改为非球面形状。将给出制造示例，并且将描述微透镜阵列的光学性能。

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来源
《IEEE Aerospace and Electronic Systems Magazine》 |2008年第1期|p.13-17|共5页
作者
Sweatt W.C.; Gill D.D.; Adams D.P.; Vasile M.; Claudet A.A.;
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原文格式 PDF
正文语种 eng
中图分类航空;
关键词
aspherical optics; cutting tools; focused ion beam technology; microlenses; micromirrors; milling; optical arrays; optical fabrication; turning (machining); aspheric lenses; aspheric mirrors; circular diamond tools; diamond milling; focused ion beam; microlenses array;

机译：非球面光学;切削工具;聚焦离子束技术;微透镜;微镜;铣削;光学阵列;光学制造;车削（加工）;非球面透镜;非球面镜;圆形金刚石工具;金刚石铣削;聚焦离子束;微透镜阵列;

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2. Fabrication and characterization of diamond micro-optics [J] . C.L. Lee, H.W. Choi, E. Gu Diamond and Related Materials . 2006,第4a8期

机译：金刚石微光学的制造与表征
3. Diamond tools for producing micro-optic elements [J] . P. Geelen, A. Cebhardt, R. Steinkopf Industrial Diamond Review . 2005,第3期

机译：用于生产微光学元件的金刚石工具
4. Diamond milling of micro-optics [C] . Sweatt W.C., Gill D.D., Adams D.P., IEEE Aerospace Conference . 2006

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机译：金刚石涂层立铣刀对ZrO2陶瓷的延性模式微铣削的实验研究
7. One-step generation of hybrid micro-optics with high-frequency diffractive structures on infrared materials by ultra-precision side milling [O] . Zhanwen Sun, Suet To, K. M. Yu 2018

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8. Operations Charioteer, Musketeer, Touchstone, Cornerstone, Aqueduct, Sculpin and Julin. Tests Mill Yard, Diamond Beech, Mighty Oak, Middle Note Mission Ghost, Mission Cyber, Misty Echo, Disko Elm, Mineral Quarry, Distant Zenith, Diamond Fortune, and Hunters Trophy [R] . Schoengold, C. R. 1999

机译：操作战车，火枪手，试金石，基石，渡槽，sculpin和Julin。测试mill Yard，Diamond Beech，mighty Oak，middle Note mission Ghost，mission Cyber，misty Echo，Disko Elm，mineral Quarry，Distant Zenith，Diamond Fortune和Hunters Trophy

Diamond Milling of Micro-Optics

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