Current Capabilities of MEMS Capacitive Accelerometers in a Harsh Environment

Jean-Michel S.

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Current Capabilities of MEMS Capacitive Accelerometers in a Harsh Environment

机译：恶劣环境下MEMS电容式加速度计的当前功能

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One of the general trends of the MEMS sensors business is the utilization of the technology to satisfy harsh environment requirements (temperature, shock, vibration, environment security). The conjunction of material (standard silicon, SiC or SOI), with complex micromachining techniques and advanced assembly techniques are the key to provide robust sensors with a minimum concession on specification. The goal of this paper is to present progress on gun hard (>20,000 g) and wide temperature range MEMS accelerometers (-120degC to +180degC). Concrete solutions and results (out of more than 500 tested products) will be presented and discussed in detail

机译：MEMS传感器业务的总体趋势之一是利用该技术满足苛刻的环境要求（温度，冲击，振动，环境安全）。材料（标准硅，SiC或SOI）与复杂的微加工技术和先进的组装技术的结合是为传感器提供最小规格要求的坚固传感器的关键。本文的目的是介绍在耐火（> 20,000 g）和宽温度范围的MEMS加速度计（-120degC至+ 180degC）上的进展。将详细介绍和讨论具体的解决方案和结果（超过500种经过测试的产品）

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《IEEE Aerospace and Electronic Systems Magazine》 |2006年第11期|p.29-32|共4页
作者
Jean-Michel S.;
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正文语种 eng
中图分类航空;
关键词
accelerometers; assembling; capacitive sensors; micromachining; microsensors; silicon compounds; silicon-on-insulator; -120 to 180 C; MEMS capacitive accelerometers; MEMS sensors; SOI; SiC; assembly techniques; environment security; harsh environment requirements; micr;

机译：加速度计;组装;电容传感器;微机械加工;微传感器;硅化合物;绝缘体上硅;-120至180 C;MEMS电容式加速度计;MEMS传感器;SOI;SiC;组装技术;环境安全性;恶劣环境要求;微米;

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1. Current Capabilities of MEMS Capacitive Accelerometers in a Harsh Environment [J] . Jean-Michel S. IEEE Aerospace and Electronic Systems Magazine . 2006,第期

机译：恶劣环境下MEMS电容式加速度计的当前功能
2. Design and simulation of MEMS based capacitive pressure sensor for harsh environment [J] . Microsystem technologies . 2020,第6期

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3. Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments [J] . Dean R. N., Anderson A., Reeves S. J., Industrial Electronics, IEEE Transactions on . 2011,第7期

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4. Current capabilities of MEMS capacitive accelerometers in harsh environment [C] . Stauffer, J.-M. . 2006

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5. Poly-crystalline silicon carbide passivated capacitive MEMS strain gauge for harsh environments. [D] . Jamshidi, Babak. 2008

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7. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment [O] . Azrul A. Hamzah, Siti A. Zawawi, Burhanuddin Y. Majlis, 2017

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Current Capabilities of MEMS Capacitive Accelerometers in a Harsh Environment

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