Progress in CMOS integrated measurement systems

Baltes H.; Brand O.

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Progress in CMOS integrated measurement systems

机译：CMOS集成测量系统的进展

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Selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich are reviewed: (i) a fluxgate microsystem for detection of the Earth's magnetic field; (ii) a capacitive chemical sensor microsystem for detection of volatile organic compounds in air; and (iii) a parallel scanning AFM chip. The micro- and nano-systems combine sensor structures and readout circuitry on a single chip and are fabricated using industrial CMOS technology in combination with post-processing micromachining and film deposition.

机译：苏黎世联邦理工学院物理电子实验室最近开发的选定的微系统和纳米系统受到了审查：（i）用于探测地球磁场的磁通门微系统；（ii）用于检测空气中挥发性有机化合物的电容式化学传感器微系统；（iii）并行扫描AFM芯片。微系统和纳米系统在单个芯片上结合了传感器结构和读出电路，并使用工业CMOS技术与后处理微加工和膜沉积相结合制成。

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《IEEE Aerospace and Electronic Systems Magazine》 |1999年第10期|P.29-34|共6页
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Baltes H.; Brand O.;
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1. Progress in CMOS integrated measurement systems [J] . Baltes H., Brand O. IEEE Aerospace and Electronic Systems Magazine . 1999,第10期

机译：CMOS集成测量系统的进展
2. Fully Integrated CMOS Microsystem for Electrochemical Measurements on 32 × 32 Working Electrodes at 90 Frames Per Second [J] . Joerg Rothe, Olivier Frey, Alexander Stettler, Analytical chemistry . 2014,第13期

机译：完全集成的CMOS微系统，用于以每秒90帧的速度在32×32工作电极上进行电化学测量
3. An Integrated High-Precision Probe System in 0.18-$mu{rm m}$ CMOS for Near-Field Magnetic Measurements on Cryptographic LSIs [J] . Mai-Khanh N.N., Iizuka T., Yamada M., IEEE sensors journal . 2013,第7期

机译：集成高精度探头系统，采用0.18-μm{rm m} $ CMOS，用于加密LSI上的近场磁测量
4. Progress in CMOS integrated measurement systems [C] . Baltes, H., Brand, Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE . 1999

机译：CMOS集成测量系统的进展
5. Integrated CMOS microsystems for carbon nanotubes based sensing and integrated micro-array for multiplexed analyte detection using electro-chemiluminescence [D] . Agarwal, Vinay 2008

机译：用于基于碳纳米管的传感的集成CMOS微系统和用于使用电化学发光进行多重分析物检测的集成微阵列
6. Fully Integrated CMOS Microsystem for Electrochemical Measurements on 32 × 32 Working Electrodes at 90 Frames Per Second [O] . Joerg Rothe, Olivier Frey, Alexander Stettler, -1

机译：完全集成的CMOS微系统用于以每秒90帧的速度在32×32工作电极上进行电化学测量
7. Thermal measurements of integrated inductors in CMOS technology and simple 1D analytical model of heat conduction [O] . I. Papagiannopoulos, M. Kaluza, B. Wiecek, 2014

机译：CMOS技术中集成电感器的热测量和热传导简单1D分析模型
8. Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement units [R] . Smith, J. H. , Ellis, J. R. , Montague, S. , 1997

机译：将集成mEms / CmOs技术应用于惯性测量单元的关键问题

Progress in CMOS integrated measurement systems

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