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Design and modeling of a novel translational and angular micro-electromechanical accelerometer

机译：新型平移和角度微机电加速度计的设计与建模

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A continuous model is presented for a combined translational/angular micro capacitive accelerometer. New design includes two rectangular micro-beams, square shaped proof mass and four pairs of parallel capacitors, which are located in an appropriate construction. In order to find the transverse/torsional vibration effects of micro-beams on the proof mass, the Euler-Bernoulli beam theory is used to derive the governing partial differential equations of the problem which are then solved using modal analysis. Effects of squeeze film on the motion of the proof mass, including both spring and dissipative forces/moments, are considered using nonlinear isothermal Reynold's equation. Afterwards, these equations are solved using HPM method. Electrostatic forces/moments of capacitors are also included in the modeling analysis. Finally, the system of two second-order time-dependent differential equations is obtained. Appropriate formulation in order to correlate the output voltages of the system to the actual input accelerations is presented. Furthermore, output responses are precisely calibrated to form input accelerations. Results for different types of inputs are delineated as five case studies. Apart from transient part of the responses, the model predictions for both angular and translational accelerations show reasonably acceptable convergence with input accelerations of the system. Moreover, results revealed that for various combinations of input accelerations, the system presents reasonably accurate output predictions for each one. (C) 2015 Elsevier Masson SAS. All rights reserved.
机译：提出了一种用于组合式平移/角度微电容加速度计的连续模型。新设计包括两个矩形微束，方形验证质量块和四对并联电容器，它们以适当的结构放置。为了找到微束对检验质量的横向/扭转振动影响，使用欧拉-伯努利梁理论推导了该问题的控制偏微分方程，然后使用模态分析对其进行求解。使用非线性等温雷诺方程考虑了挤压膜对检测质量运动的影响，包括弹簧力和耗散力/力矩。然后，使用HPM方法求解这些方程。电容器的静电力/力矩也包括在建模分析中。最后，获得了两个二阶时变微分方程组。为了使系统的输出电压与实际输入加速度相关，提出了适当的公式。此外，对输出响应进行精确校准以形成输入加速度。不同类型输入的结果描述为五个案例研究。除了响应的瞬态部分之外，角加速度和平移加速度的模型预测都显示出与系统输入加速度相当合理的收敛性。此外，结果表明，对于输入加速度的各种组合，系统会为每个加速度提供合理准确的输出预测。 （C）2015 Elsevier Masson SAS。版权所有。

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