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Self-Assembled Monopole Antennas With Arbitrary Shapes and Tilt Angles for System-on-Chip and System-in-Package Applications

机译:具有任意形状和倾斜角度的自组装单极天线,用于片上系统和片上系统

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摘要

The design, fabrication and measurement of self-assembled vertical and oblique monopole antennas, are presented. Vertical on-chip antennas offer advantages over conventional on-chip planar antennas, most notably potentially higher efficiency with associated superior coupling between distant and adjacent ports along the direction of the chip plane. The fabrication method enables lithographical specification of the monopole profile and its sloping angle so that the orientation and shape of monopoles can be controlled. The fabrication process uses SU-8 material and is performed under 200 $^{circ}$C and is therefore compatible with many commercial microelectronic fabrication processes such as complementary metal-oxide silicon (CMOS) technology. This allows the integration of the antennas with CMOS front ends and other signal processing stages for communications or sensing.
机译:介绍了自组装垂直和倾斜单极天线的设计,制造和测量。垂直的片上天线提供了优于常规的片上平面天线的优势,最显着的是潜在的更高的效率,以及沿芯片平面方向的远方端口与相邻端口之间的相关联的出色耦合。该制造方法使得能够对单极轮廓及其倾斜角度进行光刻规定,从而可以控制单极的取向和形状。该制造工艺使用SU-8材料,并且在200℃下进行,因此与许多商业微电子制造工艺兼容,例如互补金属氧化物硅(CMOS)技术。这样可以将天线与CMOS前端以及其他用于通信或传感的信号处理阶段集成在一起。

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