A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field

Fu Xinkai; Dai Fei; Hu Ruitao

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A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field

机译：基于多物理场的射频放电等效电路模型研究

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摘要

Belongs to EMC problems, the equivalent circuit model of RF discharge is studied. By establishing the correlation between circuit parameters of equivalent circuit and plasma characteristics, this paper conducts a brief analysis on the RF discharge mechanism with different frequencies.

机译：属于EMC问题，研究了射频放电的等效电路模型。通过建立等效电路参数与等离子体特性之间的相关性，对不同频率的射频放电机理进行了简要分析。

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来源
《Applied Computational Electromagnetics Society journal》 |2019年第6期|956-961|共6页
作者
Fu Xinkai; Dai Fei; Hu Ruitao;
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作者单位

Beihang Univ, Sch Elect & Informat Engn, Beijing 100191, Peoples R China;

Beihang Univ, Sch Elect & Informat Engn, Beijing 100191, Peoples R China;

Beihang Univ, Sch Elect & Informat Engn, Beijing 100191, Peoples R China;

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原文格式 PDF
正文语种 eng
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关键词
Equivalent circuit model; multi-physics simulation; RF discharge;

机译：等效电路模型;多物理模拟;RF放电;

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1. A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field [J] . Fu Xinkai, Dai Fei, Hu Ruitao Applied Computational Electromagnetics Society journal . 2019,第6期

机译：基于多物理领域的RF放电等效电路模型研究
2. Modeling of multi-physics transients in PEM fuel cells using equivalent circuits for consistent representation of electric, pneumatic, and thermal quantities [J] . Lan Tian, Strunz Kai International journal of electrical power and energy systems . 2020,第Jula期

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3. Quasi-static numerical modeling of miniature RF circuits based on lumped equivalent circuits [J] . Li Hongliang, Jin Jian-Ming, Jachowski Doug, International journal of numerical modelling . 2021,第1期

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5. Design of RF circuits with embedded multi-physics models of MEMS devices. [D] . Lee, Yongjae. 2006

机译：具有嵌入式MEMS设备的多物理模型的RF电路设计。
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7. Studies on effect of high electric fields on microorganisms. Theoretical analysis of the effect of electrical sterilization using an equivalent circuit as a model. [O] . Eisyo KONDO, Yuziro SAKURAUCHI 1982

机译：高电场对微生物的影响研究。等效电路作为模型的电气灭菌效果的理论分析。

A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field

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