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Analysis of surface mechanical properties effects on the dynamic characteristics of a circular micro-diaphragm with a distributed mass

机译:分析表面力学性能对具有分布质量的圆形微振膜动力特性的影响

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摘要

The influences of surface mechanical properties effects on the dynamic characteristics of a circular micro-diaphragm with a partially uniformly distributed mass are investigated. Surface mechanical properties effects on two sides are considered to be different as one side of the diaphragm contacts with biochemical media. A size-dependent analytical model is developed based on the thin plate theory and surface elasticity theory for the micro-diaphragm with a partially uniformly distributed mass. The Galerkin procedure is used to solve the governing equation. The size-dependence of the natural frequency and mass sensitivity of the micro-diaphragm with different surface mechanical properties effects is discussed. Results show that the influences of different surface mechanical properties effects on the natural frequency and mass sensitivity are more significant for thinner micro-diaphragms. The influences depend on the differences in the surface mechanical properties effects of the two surfaces.
机译:研究了表面机械性能对质量部分均匀分布的圆形微振膜动力特性的影响。膜片的一侧与生化介质接触时,两侧的表面机械性能影响被认为是不同的。基于薄板理论和表面弹性理论,针对具有部分均匀分布质量的微隔膜建立了尺寸相关的分析模型。 Galerkin程序用于求解控制方程。讨论了具有不同表面力学性能影响的微振膜固有频率的大小依赖性和质量敏感性。结果表明,对于更薄的微隔膜,不同的表面机械性能对固有频率和质量敏感性的影响更为显着。影响取决于两个表面的表面机械性能影响的差异。

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