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Response of anisotropic thermoelastic micro-beam resonators under dynamic loads

机译：动态载荷下各向异性热弹性微束谐振器的响应

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In this paper, the dynamic response of homogeneous, transversely isotropic, thermoelastic micro-beam resonators subjected to time-varying transverse loads has been investigated in the context of generalised theory of thermoelasticity. The micro-beam is modeled based on Euler-Bernoulli beam theory. The beam is assumed to be at clamped-clamped conditions at its axial ends. The analytical solution has been obtained by using the Laplace transform technique in the time domain. The inversion of the transformed solution has been carried out by using calculus of residues. The analytical expressions for deflection obtained in the physical domain have been computed numerically for a silicon micro-beam with the help of MATLAB software. The numerically analysed results for deflection of clamped-clamped thermoelastic silicon (Si) micro-beam with length, time and frequency ratio due to acting dynamic loads have been presented graphically. The present model may be used in micro-electromechanical applications such as relay switches, frequency filters, mass flow sensors, accelerometers and resonators.
机译：本文在广义热弹性理论的背景下研究了均质，横观各向同性，热弹性微梁谐振器在时变横向载荷下的动态响应。基于Euler-Bernoulli束理论对微束建模。假定梁的轴向端处于夹紧状态。通过在时域中使用拉普拉斯变换技术获得了解析解。通过使用残留物的微积分进行了转化溶液的转化。借助于MATLAB软件，已对硅微束在物理域中获得的挠度解析表达式进行了数值计算。以图形方式给出了由于作用的动态载荷而导致的长度，时间和频率比对夹持式热弹性硅（Si）微梁挠度的数值分析结果。本模型可用于微机电应用中，例如继电器开关，频率滤波器，质量流量传感器，加速度计和谐振器。

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