Stability of electrostatic actuated membrane mirror devices

Peter Kurczynski; Harold M. Dyson; Bernard Sadoulet

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Stability of electrostatic actuated membrane mirror devices

机译：静电膜反射镜装置的稳定性

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摘要

Membrane mirrors with transparent electrodes were fabricated for adaptive optics. These devices are capable of generating large, low-spatial-order deformations but exhibit instability for high-order deformations. A variational calculation of the electrostatic and mechanical energy of such membrane devices leads to criteria for stable operation. Simulations based upon this calculation are able to reproduce the observed behavior of fabricated devices and suggest suitable device parameters for improved performance with high-order deformations.

机译：制造带有透明电极的膜镜用于自适应光学。这些设备能够产生大的，低空间阶的变形，但对于高阶变形表现出不稳定性。这种膜装置的静电和机械能的变化计算导致稳定运行的标准。基于此计算的仿真能够重现所观察到的制造设备的行为，并提出合适的设备参数，以改善具有高阶变形的性能。

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《Applied Optics》 |2006年第32期|p.8288-8297|共10页
作者
Peter Kurczynski; Harold M. Dyson; Bernard Sadoulet;
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University of California at Berkeley, Berkeley, California 94720;

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正文语种 eng
中图分类计量学;
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1. Stability of electrostatic actuated membrane mirror devices [J] . Peter Kurczynski, Harold M. Dyson, Bernard Sadoulet Applied optics . 2006,第32期

机译：静电膜反射镜装置的稳定性
2. Thermo-pneumatically actuated, membrane-based micro-mirror devices [J] . Werber A, Zappe H Journal of Micromechanics and Microengineering . 2006,第12期

机译：热气动驱动的基于膜的微镜设备
3. Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices [J] . A. Arun, D. Acquaviva, M. Fernandez-Bolanos, Microelectronic Engineering . 2010,第5a8期

机译：用于静电驱动微机电设备的碳纳米管垂直膜
4. A low-cost, 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy [C] . Kaustubh Bancrjee, Pouya Rajaeipour, Caglar Ataman, SPIE OPTO Conference . 2018

机译：带有聚酰亚胺膜的低成本25驱动器静电可变形反射镜，用于自适应光学显微镜
5. Electrostatically Actuated 2D MEMS Micro-Mirror. [D] . Imam, Hasan Tareq. 2010

机译：静电驱动2D MEMS微镜。
6. Stability Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices [O] . Wen-Ming Zhang, Guang Meng, Di Chen 2007

机译：静电驱动MEMS器件的稳定性非线性和可靠性
7. On the dynamic pull-in instability in a mass-spring model of electrostatically actuated MEMS devices [O] . Flores, Gilberto 2016

机译：关于质量弹簧模型中动态吸合不稳定性的研究静电驱动的mEms器件
8. Closed Loop Electrostatic Actuation of Membrane Mirrors [R] . Wickersham, M. A., Fehrman, B. C., Korde, U. A. 2010

机译：膜镜的闭环静电驱动

Stability of electrostatic actuated membrane mirror devices

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