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首页> 外文期刊>Applied Physics Letters >Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)
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Stiffness-mass decoupled silicon disk resonator for high resolution gyroscopic application with long decay time constant (8.695 s)

机译：刚度-质量解耦硅盘谐振器，用于高分辨率陀螺仪，具有长的衰减时间常数（8.695 s）

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摘要

We propose a stiffness-mass decoupling concept for designing large effective mass, low resonant frequency, small size, and high quality factor microanomechanical resonators. This technique is realized by hanging lumped masses on the frame structure. An example of a stiffness-mass decoupled silicon disk resonator for gyroscopic application is demonstrated. It shows a decay time constant of 8.695 s, which is at least 5 times longer than that of the pure frame silicon disk resonator and is even comparable with that of the micromachined three-dimensional wine-glass resonators made from diamond or fused silica. The proposed design also shows a Brownian noise induced angle random walk of 0.0009°/√h, which is suitable for making an inertial grade MEMS gyroscope.
机译：我们提出一种刚度-质量去耦概念，以设计大有效质量，低谐振频率，小尺寸和高品质因数的微/纳米机械谐振器。通过将集总块悬挂在框架结构上来实现此技术。演示了用于陀螺仪的刚度-质量解耦硅盘谐振器的示例。它的衰减时间常数为8.695 s，比纯框架硅盘谐振器的衰减时间常数至少长5倍，甚至可以与由金刚石或熔融石英制成的微加工三维酒杯谐振器的衰减时间常数相提并论。提出的设计还显示出布朗噪声引起的角度随机游动为0.0009°/√h，适用于制造惯性级MEMS陀螺仪。

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  • 来源
    《Applied Physics Letters》 |2016年第26期|263501.1-263501.4|共4页
  • 作者

    Xin Zhou; Dingbang Xiao; Xuezhong Wu; Yulie Wu; Zhanqiang Hou; Kaixuan He; Qingsong Li;

  • 作者单位

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

    East China Institute of Photo-Electronic IC, Bengbu 233042, China;

    College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha 410073, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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