Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers

Elise A. Corbin; Keunhan Park; William P. King

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Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers

机译：室温温度敏感性和掺杂硅微悬臂梁的分辨率

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An atomic force microscope microcantilever having an integrated solid-state resistor can be used as a heater or a resistive thermometer. The temperature sensitivity and resolution of these cantilevers were investigated under steady and periodic operation near 300 K. Overall, the temperature coefficient of resistance of the cantilever is 0.0029 K~(-1) at 300 K. When the cantilever is placed under periodic heating conditions the temperature resolution is measured as low as 5 mK. This characterization of heated cantilevers enables precise measurement of small temperature changes, and could improve nanoscale thermal measurements.

机译：具有集成的固态电阻器的原子力显微镜微悬臂梁可用作加热器或电阻温度计。在300 K附近进行稳定和周期性操作时，研究了这些悬臂的温度敏感性和分辨率。总体而言，悬臂的电阻温度系数在300 K时为0.0029 K〜（-1）。测量的温度分辨率低至5 mK。加热的悬臂的这种特性使得可以精确测量微小的温度变化，并可以改善纳米级的热测量。

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《Applied Physicsletters》 |2009年第24期|243503.1-243503.3|共3页
作者
Elise A. Corbin; Keunhan Park; William P. King;
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作者单位

Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, USA;

Department of Mechanical Engineering and Applied Mechanics, University of Rhode Island, Kingston, Rhode Island 02881, USA;

Department of Mechanical Science and Engineering, Universitv of Illinois Urbana-Champaign, Urbana, Illinois 61801, USA;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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正文语种 eng
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7. Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers [O] . Corbin Elise A. 2009

机译：衬底依赖性，温度依赖性和温度敏感性以及掺杂硅微悬臂梁的分辨率

Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers

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