Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

Z. J. Wang; Z. P. Cao; Y. Otsuka; N. Yoshikawa; H. Kokawa; S. Taniguchi

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Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

机译：利用低功率2.45 GHz微波辐射的磁场低温生长铁酸锆钛酸铅钛薄膜

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Pb(Zr_xTi_(1-x)O_3 (PZT) thin films were coated on Pt/Ti/SiO_2/Si substrates by the sol-gel method and then crystallized by using the magnetic field of 2.45 GHz microwave irradiation. The elevated temperature generated by microwave irradiation used to obtain the perovskite phase was only 450 ℃, which is significantly lower than that of conventional thermal processing. The PZT films crystallized by microwave irradiation showed similar ferroelectric properties to those of the films crystallized by conventional thermal processing at 600 ℃. It is clear that single-mode 2.45 GHz microwave irradiation in the microwave magnetic field is effective for obtaining perovskite PZT thin films at low temperatures.

机译：通过溶胶-凝胶法将Pb（Zr_xTi_（1-x）O_3（PZT）薄膜涂覆在Pt / Ti / SiO_2 / Si衬底上，然后在2.45 GHz微波辐射的磁场下结晶。用于获得钙钛矿相的微波辐射仅为450℃，明显低于常规热处理，通过微波辐照结晶的PZT薄膜的铁电性能与常规在600℃热处理的薄膜相似。显然，微波磁场中的单模2.45 GHz微波辐射对于在低温下获得钙钛矿PZT薄膜是有效的。

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来源
《Applied Physicsletters》 |2008年第22期|184-186|共3页
作者
Z. J. Wang; Z. P. Cao; Y. Otsuka; N. Yoshikawa; H. Kokawa; S. Taniguchi;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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1. Low-temperature crystallization of sol-gel-derived lead zirconate titanate thin films using 2.45 GHz microwaves [J] . Ankam Bhaskar, T.H. Chang, H.Y. Chang, Thin Solid Films . 2007,第5期

机译：使用2.45 GHz微波对源自溶胶凝胶的钛酸锆钛酸铅薄膜进行低温结晶
2. Low-temperature growth of high-quality lead zirconate titanate thin films by 28 GHz microwave irradiation [J] . Z. J. Wang, H. Kokawa, H. Takizawa, Applied Physics Letters . 2005,第21期

机译：28 GHz微波辐射低温生长高质量锆钛酸铅钛薄膜
3. Electrical Properties and Microstructure of Low-Temperature-Crystallized Lead Zirconate Titanate Thin Films Prepared by 2.45 GHz Microwave Irradiation [J] . Zhan Jie Wang, Yuka Otsuka, Zhiping Cao, Japanese journal of applied physics . 2009,第9issue2期

机译：2.45 GHz微波辐射制备的低温结晶锆钛酸铅钛酸盐薄膜的电学性质和微观结构
4. Low-temperature Crystallization of Lead Zirconate Titanate Thin Films Using 2.45GHz Microwaves [C] . T. H. Chang, Ankam Bhaskar, H. Y. Chang, Progress in Electromagnetics Research Symposium 2007(2007年电磁学研究新进展学术研讨会）（PIERS 2007)论文集 . 2007

机译：使用2.45GHz微波对钛酸锆钛酸铅薄膜进行低温结晶
5. Substrate dependence on the growth and texture of lead titanate and lead zirconate titanate thin films by metal organic chemical vapor deposition. [D] . Yen, Bi-Ming. 1997

机译：基材通过金属有机化学气相沉积对钛酸铅和锆钛酸铅薄膜的生长和织构的依赖性。
6. The therapeutic effect of a pulsed electromagnetic field on the reproductive patterns of male Wistar rats exposed to a 2.45-GHz microwave field [O] . Sanjay Kumar, Kavindra Kumar Kesari, Jitendra Behari 2011

机译：脉冲电磁场对暴露于2.45-GHz微波场的雄性Wistar大鼠生殖方式的治疗作用
7. Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin films [O] . J. Pérez de la Cruz, E. Joanni, P. M. Vilarinho, 2010

机译：铁电引线锆钛晶薄膜电介质，铁电和压电性能的厚度效应

Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation

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