The authors report on fabrication and hydrogen separation performance of an array of thin, freestanding Pd/Ag alloy membranes. Film deposition from an alloyed sputtering target results in robust film characteristics. Long-term stability of the membranes has been demonstrated with experimental testing at temperatures of 473-627 K. Within the testing period the membrane has withstood more than 30 thermal cycles by returning to ambient temperature between subsequent tests. Throughout the long-term testing, hydrogen permeation levels have increased by more than a factor of 2. Electron microscopy of the membranes indicates that performance enhancement is due to microstructural changes which are promoted at elevated temperatures.
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