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首页> 外文期刊>Applied Physics Letters >Bulk-acoustic waves radiated from low-loss surface-acoustic-wave resonators
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Bulk-acoustic waves radiated from low-loss surface-acoustic-wave resonators

机译:低损耗表面声波谐振器辐射出的体声波

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摘要

The bulk-acoustic conductance in low-loss surface-acoustic-wave filters utilizing leaky surface-acoustic waves is significant for the device operation. Here we directly measure the bulk acoustic wave radiation pattern on the backside of the piezoelectric substrate with the help of a scanning laser-interferometer probe. For the case studied, a leaky surface-acoustic wave resonator on 36° YX-LiTaO_(3), a numerical calculation is carried out and the different bulk-wave modes arriving at the substrate bottom are identified by comparing the measured and computed energy-flow angles. The results are expected to lead to improved models for describing the operation of low-loss surface-acoustic-wave filters.
机译:利用泄漏的表面声波的低损耗表面声波滤波器中的体声电导对于设备操作非常重要。在这里,我们借助扫描激光干涉仪探头直接测量压电基板背面的体声波辐射方向图。对于所研究的情况,在36°YX-LiTaO_(3)上的泄漏表面声波谐振器进行了数值计算,并通过比较测量和计算出的能量来确定到达基板底部的不同体波模式,流动角度。预期结果将导致用于描述低损耗表面声波滤波器操作的改进模型。

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