Hydrocarbon detection via ion implantation in metal-insulator-semiconductor devices

Medlin JW; Bastasz R; McDaniel AH

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Hydrocarbon detection via ion implantation in metal-insulator-semiconductor devices

机译：通过金属-绝缘体-半导体器件中的离子注入进行碳氢化合物检测

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摘要

A method for using metal-insulator-semiconductor (MIS) sensors to detect hydrocarbons is described. In this method, hydrocarbon gases are ionized and focused in an energetic beam onto the surface of a MIS device using an ion gun. This detection scheme is found to be selective to hydrogen-containing compounds, with other species yielding no detectable response. The magnitude of the sensor response is found to be a strong function of the current flux and beam energy. These results suggest that ion implantation in MIS devices may be a useful sensing strategy for detection of various combustible gases. (C) 2004 American Institute of Physics.

机译：描述了一种使用金属-绝缘体-半导体（MIS）传感器检测碳氢化合物的方法。在这种方法中，使用离子枪将碳氢化合物气体电离并以高能束的形式聚焦到MIS装置的表面上。发现该检测方案对含氢化合物具有选择性，其他物种则未产生可检测的响应。发现传感器响应的大小是电流和光束能量的强函数。这些结果表明，MIS设备中的离子注入可能是检测各种可燃气体的有用传感策略。（C）2004美国物理研究所。

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来源
《Applied Physics Letters》 |2004年第22期|p. 5457-5459|共3页
作者
Medlin JW; Bastasz R; McDaniel AH;
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作者单位

Sandia Natl Labs, Livermore, CA 94550 USA;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
SENSITIVE MOS-STRUCTURES; FIELD-EFFECT DEVICES; SENSORS; ADSORPTION;

机译：灵敏的MOS结构;场效应器件;传感器;吸附;

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5. THE FABRICATION AND EXPERIMENTAL ANALYSIS OF METAL-INSULATOR-SEMICONDUCTOR DEVICES FOR RADIATION VULNERABILITY STUDIES. [D] . WILLIAMSON, THOMAS ALLEN. 1972

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6. Influence of time between last myocardial infarction and prophylactic implantable defibrillator implant on device detections and therapies. Routine Practice data from the SEARCH MI registry [O] . Giuseppe Boriani, Gianluca Botto, Maurizio Lunati, 2012

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Hydrocarbon detection via ion implantation in metal-insulator-semiconductor devices

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