Picosecond laser registration of interference pattern by oxidation of thin Cr films

Veiko Vadim; Yarchuk Michail; Zakoldaev Roman; Gedvilas Mindaugas; Raciukaitis Gediminas; Kuzivanov Michail; Baranov Alexander

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Picosecond laser registration of interference pattern by oxidation of thin Cr films

机译：皮秒级薄膜氧化使皮秒激光对准干涉图样

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摘要

The laser oxidation of thin metallic films followed by its selective chemical etching is a promising method for the formation of binary metal structures on the glass substrates. It is important to confirm that even a single ultrashort laser pulse irradiation is able to create the protective oxide layer that makes possible to imprint the thermochemical image.

机译：薄金属膜的激光氧化，然后进行选择性化学蚀刻，是在玻璃基板上形成二元金属结构的有前途的方法。重要的是要确认，即使是单个超短激光脉冲辐照也能够产生保护性氧化层，从而可以在热化学图像上进行印记。

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来源
《Applied Surface Science》 |2017年第may15期|63-66|共4页
作者
Veiko Vadim; Yarchuk Michail; Zakoldaev Roman; Gedvilas Mindaugas; Raciukaitis Gediminas; Kuzivanov Michail; Baranov Alexander;
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作者单位

ITMO Univ, Kronverksky Ave 49 St, St Petersburg 197101, Russia;

ITMO Univ, Kronverksky Ave 49 St, St Petersburg 197101, Russia;

ITMO Univ, Kronverksky Ave 49 St, St Petersburg 197101, Russia;

Ctr Phys Sci & Technol, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania;

Ctr Phys Sci & Technol, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania;

ITMO Univ, Kronverksky Ave 49 St, St Petersburg 197101, Russia;

ITMO Univ, Kronverksky Ave 49 St, St Petersburg 197101, Russia;

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正文语种 eng
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关键词
Thermochemical recording; Interference writing; Ultra-short laser pulses; Raman spectroscopy; Thin films; Oxidation;

机译：热化学记录;干扰写;超短激光脉冲;拉曼光谱;薄膜;氧化;

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专利

1. Thermo-chemical microstructuring of thin metal films using multi-beam interference by short (nano- & picosecond) laser pulses [J] . Gedvilas Mindaugas, Voisiat Bogdan, Indrisiunas Simonas, Thin Solid Films . 2017,第jula31期

机译：使用短（纳秒和皮秒）激光脉冲的多光束干涉对金属薄膜进行热化学微结构化
2. Laser scribing of gallium doped zinc oxide thin films using picosecond laser [J] . Anna Risch, Ralf Hellmann Applied Surface Science . 2011,第5期

机译：使用皮秒激光对镓掺杂的氧化锌薄膜进行激光刻划
3. Selective patterning and scribing of Ti thin film on glass substrate by 532 nm picosecond laser [J] . K.C. Yung, Z. Cai, H.S. Choy Applied Physics . 2012,第2期

机译：532 nm皮秒激光对玻璃基板上的Ti薄膜进行选择性构图和划线
4. Microstructure of sputter-deposited noble metal-incorporated oxide thin films patterned by means of laser interference [C] . Rodolphe Catrin, Thomas Gries, David Horwat, MRS spring meeting . 2012

机译：激光干涉形成的溅射沉积贵金属结合氧化物薄膜的微观结构
5. Direct laser interference patterning of magnetic thin films. [D] . Aktag, Aliekber. 2004

机译：对磁性薄膜进行直接激光干涉图案化。
6. Picosecond Laser Interference Patterning of Periodical Micro-Architectures on Metallic Molds for Hot Embossing [O] . Yangxi Fu, Marcos Soldera, Wei Wang, 2019

机译：用于热压花的金属模具上的周期性微结构的皮秒激光干涉图案
7. Selective patterning and scribing of Ti thin film on glass substrate by 532 nm picosecond laser [O] . Yung KC, Cai Z, Choy HS 2012

机译：532 nm皮秒激光对玻璃基板上的Ti薄膜进行选择性构图和划线
8. Excimer-Laser-Induced Sub-0.5-micrometer Patterning of WO3 Thin Films [R] . Rothschild, M., Forte, A. R. 1991

机译：准分子激光诱导的WO3薄膜亚0.5微米图案化

Picosecond laser registration of interference pattern by oxidation of thin Cr films

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