'/> Optical and structural characterization of Ge clusters embedded in ZrO_2
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied Surface Science >Optical and structural characterization of Ge clusters embedded in ZrO_2
【24h】

Optical and structural characterization of Ge clusters embedded in ZrO_2

机译：嵌入ZrO_2的Ge团簇的光学和结构表征。

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Graphical abstract Display Omitted Highlights • Reference optical properties for ZrO2 and amorphous Ge extracted. • Optical and structural properties of Ge nanoclusters in ZrO2 matrix. • Investigation of surface region using medium energy ion scattering. • Characterization of structural changes during annealing. • Multi-layer optical models for ellipsometry. Abstract The change of optical and structural properties of Ge nanoclusters in ZrO2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO2 and Ge-rich-ZrO2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO2 layers alternated by 5-nm-ZrO2 ones. Germanium nanoclusters in ZrO2 host were formed by rapid-thermal annealing at 600–800°C during 30s in nitrogen atmosphere. Reference optical properties for pure ZrO2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.
机译： 图形摘要 < ce：simple-para id =“ spar0005” view =“ all” /> 省略显示 突出显示 • < ce：para id =“ p0005” view =“ all”> ZrO 2 和无定形Ge提取。 • ZrO 2 矩阵中的Ge纳米团簇的光学和结构性质。< / ce：para> • 使用中能离子散射研究表面区域。 • 退火过程中结构变化的特征。 • 用于椭偏术的多层光学模型。 摘要 ZrO中Ge纳米团簇的光学和结构性质的变化 2 <已经通过椭圆偏振光谱法对退火温度进行了研究。射频自顶向下磁控溅射法用于生产不同类型的样品，即纯Ge，纯ZrO 2 和富Ge的单层-ZrO 2 以及多层堆叠的40个5纳米5nm-Ge-rich-ZrO 2 层与5nm-ZrO 2 层交替排列。 ZrO 2 主体中的锗纳米团簇是通过在30 °C下进行快速热退火而形成的：hsp sp =“ 0.25” /> s在氮气气氛中。使用单层样品已提取了纯ZrO 2 和纯Ge的参考光学性质。沉积的多层结构可以使用有效介质理论完美建模。但是，退火的多层膜显示出元素的显着扩散，这已通过中等能量离子散射测量得到了证实。这个事实会阻止通过均匀或周期性多层模型拟合此类退火结构。

著录项

  • 来源
    《Applied Surface Science》 |2017年第ptab期|283-288|共6页
  • 作者

    E. Agocs; Z. Zolnai; A.K. Rossall; J.A. van den Berg; B. Fodor; D. Lehninger; L. Khomenkova; S. Ponomaryov; O. Gudymenko; V. Yukhymchuk; B. Kalas; J. Heitmann; P. Petrik;

  • 作者单位

    Institute for Technical Physics and Materials Science (MFA), Center for Energy Research (EK), Hungarian Academy of Sciences (MTA);

    Institute for Technical Physics and Materials Science (MFA), Center for Energy Research (EK), Hungarian Academy of Sciences (MTA);

    International Institute for Accelerator Applications (IIAA), School of Computing and Engineering, University of Huddersfield;

    International Institute for Accelerator Applications (IIAA), School of Computing and Engineering, University of Huddersfield;

    Institute for Technical Physics and Materials Science (MFA), Center for Energy Research (EK), Hungarian Academy of Sciences (MTA);

    Institute of Applied Physics, TU Bergakademie Freiberg;

    V. Lashkaryov Institute of Semiconductor Physics;

    V. Lashkaryov Institute of Semiconductor Physics;

    V. Lashkaryov Institute of Semiconductor Physics;

    V. Lashkaryov Institute of Semiconductor Physics;

    Institute for Technical Physics and Materials Science (MFA), Center for Energy Research (EK), Hungarian Academy of Sciences (MTA);

    Institute of Applied Physics, TU Bergakademie Freiberg;

    Institute for Technical Physics and Materials Science (MFA), Center for Energy Research (EK), Hungarian Academy of Sciences (MTA);

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Spectroscopic ellipsometry; Ge nanoclusters; ZrO2; RF magnetron sputtering; Medium energy ion scattering;

    机译：椭圆偏振光谱法;Ge纳米团簇;ZrO2;射频磁控溅射;中能离子散射;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号