Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

著录项

• 来源
  《Applied Surface Science》 |2014年第1期|134-138|共5页
• 作者

  L. Hong; Rusli; X.C. Wang; H.Y. Zheng; H. Wang; H.Y. Yu;

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• 作者单位

  School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore,Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore;

  School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore;

  Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore;

  Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore;

  School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore;

  South University of Science and Technology of China, Shenzhen, China;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Femtosecond pulsed laser; Ripple formation; Si; Laser fluence; Optical reflection;

  机译：飞秒脉冲激光;波纹形成;激光通量;光学反射;