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首页> 外文期刊>Applied Surface Science >Development of laser deposited multilayer zone plate structures for soft X-ray radiation
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Development of laser deposited multilayer zone plate structures for soft X-ray radiation

机译：开发用于软X射线辐射的激光沉积多层波带片结构

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摘要

As a novel approach, the combination of pulsed laser deposition and focused ion beam was applied to fabricate different types of multilayer zone plate structures for soft X-ray applications. For this purpose, high quality non-periodic ZrO_2/Ti multilayers were deposited by pulsed laser deposition on planar Si substrates and on rotating steel wires with layer thicknesses according to the Fresnel zone plate law. Linear focusing optics were fabricated by cutting slices out of the multilayers by focused ion beam and placing them directly over pinholes within SJ_3N_4 substrates. Additionally, it was shown that laser deposition of depth-graded multilayers on a wire is also a promising way for building up multilayer zone plates with point focus. First experiments using a table-top X-ray source based on a laser-induced plasma show that the determined focal length and spatial resolution of the fabricated multilayer Laue lens corresponds to the designed optic.
机译：作为一种新颖的方法，脉冲激光沉积和聚焦离子束的组合被应用于制造用于软X射线应用的不同类型的多层波带片结构。为此，根据菲涅耳波带片定律，通过脉冲激光沉积在平面硅衬底上以及在旋转的钢丝上以层厚度沉积高质量的非周期性ZrO_2 / Ti多层。线性聚焦光学器件是通过用聚焦离子束将多层切成薄片并将其直接置于SJ_3N_4基板内的针孔上而制成的。另外，已经表明，在导线上激光沉积深度渐变的多层也是一种建立具有点聚焦的多层波带片的有前途的方法。使用基于激光诱导等离子体的台式X射线源进行的首次实验表明，所制造的多层劳厄透镜的确定焦距和空间分辨率与所设计的光学器件相对应。

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  • 来源
    《Applied Surface Science》 |2011年第12期|p.5138-5141|共4页
  • 作者

    Tobias Liese; Volker Radisch; Inga Knorr; Michael Reese; Peter Grossmann; Klaus Mann; Hans-Ulrich Krebs;

  • 作者单位

    lnstitut fuer Materialphysik, University of Goettingen, Friedrich-Hund-Platz 1,37077 Coettingen, Germany;

    lnstitut fuer Materialphysik, University of Goettingen, Friedrich-Hund-Platz 1,37077 Coettingen, Germany;

    lnstitut fuer Materialphysik, University of Goettingen, Friedrich-Hund-Platz 1,37077 Coettingen, Germany;

    Laser-Laboratorium Goettingen e.V., Hans-Adolf-Krebs-Weg J, 37077 Goettingen, Germany;

    Laser-Laboratorium Goettingen e.V., Hans-Adolf-Krebs-Weg J, 37077 Goettingen, Germany;

    Laser-Laboratorium Goettingen e.V., Hans-Adolf-Krebs-Weg J, 37077 Goettingen, Germany;

    lnstitut fuer Materialphysik, University of Goettingen, Friedrich-Hund-Platz 1,37077 Coettingen, Germany;

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  • 正文语种 eng
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  • 关键词

    pulsed laser deposition; multilayers; zone plate; structure;

    机译：脉冲激光沉积;多层;波带片;结构;

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