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Oxygen deficiency in oxide films grown by PLD

机译：PLD生长的氧化膜中的缺氧

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The incorporation of oxygen atoms in oxide films grown by pulsed laser deposition depends upon the oxygen pressure and laser power density. By carefully controlling these two parameters it is possible to control the oxygen deficiency in the samples, and thus to change their physical properties from insulating and transparent to absorbing and conducting. By using X-ray diffraction, Rutherford backscattering spectroscopy and resistivity measurements, we show that depending upon the oxide materials oxygen deficiency in the films can induce either the growth of stable sub-oxide phases or the formation of nanocomposite films by phase separation. The first case corresponds to oxides with a mixed valency cation like Ti, which leads to the formation of stable, crystalline and highly conductive TiO_x sub-oxide phases. The second case is well described by the indium tin oxides (ITO) in which a large oxygen deficiency leads to metallic clusters embedded into a stoichiometric matrix, i.e. nanocomposite films. This phenomenon is due to the fact that sub-oxides of these compounds are not stable and thus the oxygen deficiency induced a phase separation.
机译：在通过脉冲激光沉积生长的氧化膜中氧原子的掺入取决于氧压力和激光功率密度。通过仔细控制这两个参数，可以控制样品中的氧气不足，从而将其物理性质从绝缘和透明变为吸收和传导。通过使用X射线衍射，卢瑟福背散射光谱和电阻率测量，我们表明，取决于氧化物材料，膜中的氧缺乏会诱导稳定的亚氧化物相的生长或通过相分离形成纳米复合膜。第一种情况对应于具有混合价态阳离子（如Ti）的氧化物，这导致形成稳定，结晶和高导电性的TiO_x亚氧化物相。第二种情况通过铟锡氧化物（ITO）进行了很好的描述，其中大量的氧气不足导致金属簇嵌入化学计量的基质（即纳米复合膜）中。该现象是由于以下事实：这些化合物的亚氧化物不稳定，因此缺氧引起相分离。

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