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Effect of annealing temperature on microstructure, hardness and adhesion properties of TiSi_xN_y superhard coatings

机译：退火温度对TiSi_xN_y超硬涂层组织，硬度和附着性能的影响

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摘要

A series of TiSixNy superhard coatings with different Si contents were prepared on M42 steel substrates using two Ti and two Si targets by reactive magnetron sputtering at 500℃. These samples were subsequently vacuum-annealed at 500, 600, 700, 800 and 900℃, respectively. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), microindenter, Rockwell hardness tester and scratch tester were applied to investigate the microstructure, phase configuration, hardness and adhesion properties of as-deposited and annealed samples. The results indicated that there were two bonds, TiN and Si_3N_4, in all presently deposited TiSi_xN_y, thin films, that structure was nanocomposite of nanocrystalline (nc-) TiN embedded into amorphous Si_3N_4 matrices. Annealing treatment below 900℃ played a little role in microstructure and hardness of the coatings although it greatly affected those of steel substrates. The film-substrate adhesion strength was slightly increased, followed by an abrupt decrease with increasing annealing temperature. Its value got to the maximum at 600℃. Annealing had little effect on the friction coefficient with its value varying in the range of 0.39-0.40.
机译：在500℃下通过反应磁控溅射在M42钢基底上使用两个Ti和两个Si靶材制备了一系列不同Si含量的TiSixNy超硬涂层。这些样品随后分别在500、600、700、800和900℃下进行真空退火。利用X射线衍射（XRD），X射线光电子能谱（XPS），显微压痕仪，洛氏硬度计和划痕仪对沉积和退火后的样品进行了显微组织，相结构，硬度和粘附性能的研究。结果表明，在目前所有已沉积的TiSi_xN_y薄膜中，存在两个键TiN和Si_3N_4，该结构是嵌入非晶Si_3N_4基质中的纳米晶体（nc-）TiN的纳米复合材料。 900℃以下的退火处理对涂层的组织和硬度影响不大，尽管它对钢基材的影响很大。膜-基材的粘合强度略有增加，然后随着退火温度的升高而突然降低。 600℃时达到最大值。退火对摩擦系数影响很小，其值在0.39-0.40范围内变化。

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  • 来源
    《Applied Surface Science》 |2011年第15期|p.6380-6386|共7页
  • 作者

    Y.H. Lu; J.P. Wang; S.LTao; Z.F.Zhou;

  • 作者单位

    National Centre for Materials Service Safety, University of Science and Technology Beijing, Beijing 100083, PR China;

    School of Science, Beijing University of Civil Engineering and Architecture, Beijing 100044, PR China;

    National Centre for Materials Service Safety, University of Science and Technology Beijing, Beijing 100083, PR China;

    Department of Manufacturing Engineering & Engineering Management, City University of Hong Kong, Kowloon, Hong Kong;

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  • 正文语种 eng
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  • 关键词

    TiSi_xN_y; anocomposite; Annealing treatment; Microstructure; Adhesion;

    机译：TiSi_xN_y;纳米复合材料;退火处理;显微组织;附着力;

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