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Polymetallic citric complexes as precursors for spray-pyrolysis deposition of thin ferrite films

机译:柠檬酸多金属配合物作为铁氧体薄膜喷雾热解沉积的前体

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摘要

Thin films of ferrites of the type M~(Ⅱ)Fe_2O_4 (M = Cu, Mg, Zn) are prepared by spray-pyrolysis using ethy-lene glycol solutions of mixed-metal citric complexes of the respective metals at substrate temperature between 350℃ and 450℃ and post-deposition annealing at 480-750℃ in air. Phase composition, crystal structure, morphology and adhesion of the obtained films (40-400 nm in thickness) are studied by X-ray diffraction, SEM, energy dispersive X-ray microanalysis and AFM. Single phase dense uniform films with grains from 30-100nm (M = Cu, Mg) to 0.15-2μm (M = Zn) are obtained.
机译:在衬底温度为350℃的条件下,采用相应金属的混合柠檬酸络合物的乙二醇溶液通过喷雾热解法制备M〜(Ⅱ)Fe_2O_4(M = Cu,Mg,Zn)类型的铁氧体薄膜。 450℃,在空气中480-750℃进行沉积后退火。通过X射线衍射,SEM,能量色散X射线显微分析和AFM研究了所得薄膜(厚度为40-400 nm)的相组成,晶体结构,形态和粘附性。得到具有30-100nm(M = Cu,Mg)至0.15-2μm(M = Zn)晶粒的单相致密均匀膜。

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  • 来源
    《Applied Surface Science》 |2011年第17期|p.7821-7826|共6页
  • 作者单位

    University of Sofia, Faculty of Chemistry, 1,J. Bourchier Blvd., Sofia 1164, Bulgaria;

    University of Sofia, Faculty of Chemistry, 1,J. Bourchier Blvd., Sofia 1164, Bulgaria;

    Bulgarian Academy of Sciences, Institute of Electronics, 72, Tsarigradsko Shose Blvd., Sofia 1784, Bulgaria;

    University of Sofia, Faculty of Chemistry, 1,J. Bourchier Blvd., Sofia 1164, Bulgaria;

    University of Sofia, Faculty of Chemistry, 1,J. Bourchier Blvd., Sofia 1164, Bulgaria;

    University of Sofia, Faculty of Chemistry, 1,J. Bourchier Blvd., Sofia 1164, Bulgaria;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    thin films; ferrites; spray pyrolysis; xrd; sem; afm;

    机译:薄膜;铁氧体喷雾热解xrd;sem;AFM;

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