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X-ray standing waves in a multi-trilayer system with linearly varying period

机译：周期线性变化的多层三层系统中的X射线驻波

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摘要

Generation of X-ray standing waves in a multi-trilayer system with a varying periodicity along its depth is described. Microstructures of a synthetic 15-period Pt/Ni/C multilayer, which has such a varying periodicity, are investigated using X-ray reflectivity (XRR) and X-ray standing wave (XSW) analysis. Microstructural parameters, e.g., thicknesses and electron densities of individual layers, interface roughnesses, varying periodicity along the depth, etc. are precisely determined by the XRR technique. The variation of period is essentially introduced in multilayer fabrication by varying the thickness of the C-layer as a function of depth. The linear increase in C-layer thickness from the bottom of the multilayer towards the surface of the multilayer structure is found by simulating the XRR data with a depth-graded multilayer model. Intensity of the XSW field is computed as a function of depth over the first order Bragg peak. Integrated intensities over the Pt- and the Ni-layers are computed and compared with the measured fluorescence yield from Pt and Ni. Sensitivity for the detection of inter-atomic diffusion across the interfaces in comparison to multi-bilayer systems, such as Pt/C multilayer, is discussed.
机译：描述了在多层三层系统中沿其深度周期性变化的X射线驻波的生成。使用X射线反射率（XRR）和X射线驻波（XSW）分析研究了具有如此周期性变化的15周期Pt / Ni / C合成多层膜的微观结构。微观结构参数，例如，各个层的厚度和电子密度，界面粗糙度，沿深度的变化周期性等，都可以通过XRR技术精确确定。周期的变化本质上是通过改变C层的厚度作为深度的函数而引入多层制造中的。通过用深度渐变的多层模型模拟XRR数据，可以发现C层厚度从多层底部到多层结构表面的线性增加。 XSW场的强度根据一阶布拉格峰上的深度来计算。计算Pt和Ni层的积分强度，并将其与测得的Pt和Ni的荧光产量进行比较。讨论了与多层系统（如Pt / C多层系统）相比，检测跨界面原子间扩散的灵敏度。

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  • 来源
    《Applied Surface Science》 |2011年第17期|p.7566-7572|共7页
  • 作者

    Sumalay Roy; B.N.Dev;

  • 作者单位

    Department of Materials Science, Indian Association for the Cultivation of Science, 2A and 2B Raja S.C Mullick Road, Jadavpur, Kolkata 700032, India;

    Department of Materials Science, Indian Association for the Cultivation of Science, 2A and 2B Raja S.C Mullick Road, Jadavpur, Kolkata 700032, India;

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  • 正文语种 eng
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  • 关键词

    x-ray standing waves; x-ray reflectivity; multilayers;

    机译：X射线驻波X射线反射率;多层;

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